Ebara ETC010MA涡轮分子泵控制器  PDF资料

1.产 品 资 料 介 绍：

Ebara ETC010MA 涡轮分子泵控制器

产品概述

Ebara ETC010MA 是荏原（Ebara）生产的涡轮分子泵控制器，属于 ETC 系列，配套 EMT2400M 涡轮分子泵使用，产地为日本。

应用领域（6条）

1. 半导体制造设备：配套 EMT2400M 泵用于刻蚀、CVD、PVD 等工艺腔室的真空抽气

2. 真空镀膜设备：为溅射、蒸发等镀膜工艺提供高真空环境

3. 科研与加速器：用于粒子加速器、核物理研究等高真空系统

4. 电子显微镜：为扫描电镜等分析仪器提供真空

5. 空间模拟设备：用于航天器部件的空间环境模拟测试

6. 分析仪器：用于质谱仪、表面分析设备等

产品特点（5条）

1. 原厂配套：专为 EMT2400M 涡轮分子泵设计，工厂预设参数

2. 磁悬浮控制：支持磁轴承型分子泵的稳定运行

3. 即装即用：附带原厂手册和远程连接器

4. CE 认证：符合欧洲安全标准

5. 日本制造：品质稳定，可靠性高

总结

Ebara ETC010MA 涡轮分子泵控制器配套 EMT2400M 分子泵，广泛应用于半导体制造、真空镀膜、科研加速器及分析仪器等领域，具备原厂适配、磁悬浮控制和稳定可靠等特点，是保障高真空系统正常运行的关键部件。

Ebara ETC010MA涡轮分子泵控制器   英文介绍

Ebara ETC010MA Turbomolecular Pump Controller

Product Overview

Ebara ETC010MA is a turbo molecular pump controller produced by Ebara, belonging to the ETC series and used in conjunction with the EMT2400M turbo molecular pump. It is manufactured in Japan.

Application areas (6 items)

Semiconductor manufacturing equipment: equipped with EMT2400M pump for vacuum pumping of etching, CVD, PVD and other process chambers

Vacuum coating equipment: providing a high vacuum environment for coating processes such as sputtering and evaporation

Research and Accelerator: Used for high vacuum systems such as particle accelerators and nuclear physics research

Electron microscope: providing vacuum for analytical instruments such as scanning electron microscopy

Space simulation equipment: used for space environment simulation testing of spacecraft components

Analytical instruments: used for mass spectrometers, surface analysis equipment, etc

Product features (5 items)

Original factory support: specially designed for EMT2400M turbo molecular pump, factory preset parameters

Magnetic levitation control: supports stable operation of magnetic bearing molecular pumps

Ready to use: Comes with original factory manual and remote connector

CE certification: compliant with European safety standards

Made in Japan: Stable quality, high reliability

Summary

The Ebara ETC010MA turbo molecular pump controller, paired with the EMT2400M molecular pump, is widely used in semiconductor manufacturing, vacuum coating, scientific research accelerators, and analytical instruments. It has the characteristics of factory adaptation, magnetic levitation control, and stability and reliability, and is a key component to ensure the normal operation of high vacuum systems.

Ebara ETC010MA涡轮分子泵控制器  产品图片

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型号：Ebara ETC010MA涡轮分子泵控制器

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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