TEL 2180-020298-V1加热器电源控制器 PDF资料
TEL 2180-020298-V1 加热器电源控制器
产品概述
TEL 2180-020298-V1 是东京电子(Tokyo Electron)生产的加热器电源控制器,属于半导体制造设备的关键温控部件,产地为日本。
应用领域(8条)
半导体刻蚀设备:控制腔室加热器温度
CVD 化学气相沉积设备:调节反应腔体加热功率
PVD 物理气相沉积设备:控制靶材或基座加热
扩散炉设备:管理炉管加热区温度
退火设备:精确控制晶圆热处理温度
晶圆传输腔室:维持腔体温度稳定
涂胶显影设备:控制热板温度
其他需要精密温控的半导体工艺设备
产品特点(5条)
精密温控:为加热器提供稳定可调的电源输出
原厂品质:东京电子原装部件,适配其半导体设备
集成化设计:可直接替换原设备故障控制器
可靠性高:适用于半导体制造环境
日本制造:品质稳定,使用寿命长
总结
TEL 2180-020298-V1 加热器电源控制器是东京电子半导体设备的核心温控部件,广泛应用于刻蚀、沉积、扩散及退火等工艺设备中,具备精密温控、原厂适配和高可靠性等特点,能有效保障工艺温度的稳定性。
TEL 2180-020298-V1加热器电源控制器 英文介绍
TEL 2180-0202298-V1 Heater Power Controller
Product Overview
TEL 2180-0202298-V1 is a heater power controller produced by Tokyo Electron, which is a key temperature control component of semiconductor manufacturing equipment. It is produced in Japan.
Application areas (8 items)
Semiconductor etching equipment: controlling the temperature of the chamber heater
CVD chemical vapor deposition equipment: adjusting the heating power of the reaction chamber
PVD physical vapor deposition equipment: controlling the heating of the target material or substrate
Diffusion furnace equipment: managing the temperature in the heating zone of the furnace tube
Annealing equipment: precise control of wafer heat treatment temperature
Wafer transfer chamber: maintain stable chamber temperature
Coating and developing equipment: controlling the temperature of the hot plate
Other semiconductor process equipment that requires precise temperature control
Product features (5 items)
Precision temperature control: providing stable and adjustable power output for the heater
Original factory quality: Original components from Tokyo Electronics, compatible with its semiconductor equipment
Integrated design: can directly replace the original equipment fault controller
High reliability: suitable for semiconductor manufacturing environment
Made in Japan: Stable quality, long service life
Summary
The TEL 2180-0202298-V1 heater power controller is the core temperature control component of Tokyo Electronic Semiconductor Equipment, widely used in process equipment such as etching, deposition, diffusion, and annealing. It has the characteristics of precision temperature control, factory adaptation, and high reliability, which can effectively ensure the stability of process temperature.
TEL 2180-020298-V1加热器电源控制器 产品图片

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