AMAT 0042-34691晶圆升降组件 PDF资料
AMAT 0042-34691 晶圆升降组件
应用领域(12条)
CVD 化学气相沉积设备:交接晶圆
PVD 物理气相沉积设备:顶起或降下晶圆
刻蚀设备:顶起晶圆,避免碰伤卡盘
湿式清洗设备:升降晶圆,浸入或脱离清洗液
热处理/退火设备:高温后升起晶圆,定位冷却
晶圆传输模块:辅助机械手取放晶圆
等离子体处理设备:平稳顶升晶圆
ALD 原子层沉积设备:快速升降与交接晶圆
预清洗腔室:调整晶圆位置并传输
检测/度量设备:将晶圆放到检测台上
离子注入设备:升降晶圆,配合取放
去气/冷却腔室:升降定位晶圆
产品特点(5条)
高洁净度,减少颗粒污染
升降精确,定位准确
耐真空、耐高温
多顶针受力均匀,交接平稳
模块化设计,便于维护
总结
AMAT 0042-34691 晶圆升降组件用于沉积、刻蚀、清洗、注入及检测等半导体设备,具有高洁净、高精度、耐苛刻环境和易维护等特点,是保障晶圆稳定交接的关键部件
AMAT 0042-34691 Wafer Lift Assembly
Application areas (12 items)
CVD chemical vapor deposition equipment: wafer handover
PVD physical vapor deposition equipment: lifting or lowering wafers
Etching equipment: Lift the wafer to avoid damaging the chuck
Wet cleaning equipment: lifting wafers, immersing or removing cleaning solution
Heat treatment/annealing equipment: Raise the wafer after high temperature and position it for cooling
Wafer transfer module: auxiliary robotic arm for picking up and placing wafers
Plasma processing equipment: Smooth lifting of wafers
ALD atomic layer deposition equipment: rapid lifting and transfer of wafers
Pre cleaning chamber: adjust wafer position and transfer
Testing/Measuring Equipment: Place the wafer on the testing table
Ion implantation equipment: lifting and lowering wafers, coordinating with retrieval and placement
Degassing/cooling chamber: lifting and positioning wafer
Product features (5 items)
High cleanliness, reducing particle pollution
Accurate lifting and positioning
Resistant to vacuum and high temperature
Multiple needles with uniform force and smooth handover
Modular design for easy maintenance
Summary
AMAT 0042-34691 wafer lifting module is used for semiconductor equipment such as deposition, etching, cleaning, injection, and detection. It has the characteristics of high cleanliness, high precision, resistance to harsh environments, and easy maintenance. It is a key component to ensure stable wafer handover

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| PMB33E-00201-00 | NKTT01 | PFVA401 |
| PMB33E-00200-03 | 07YS86 | M21NSXA-LDN-HD-02 |
| PMB33E-00200-02 | 07AA80 | PFTL101BER 2.0KN 3BSE023158R1 |
| PMB33E-00200-01 | 07ET83A | PFTL101A 1.0KN 3BSE004166R1 |
| PMB33E-00200-00 | 70 AS 45b-E | PMB33F-20216-03 |
| PMB33E-00116-03 | 07ZE62R201 | 57160001-GR DSTD 320 |
| PMB33E-00116-02 | 70 BK 02a-E | P21NRXB-LDN-PD-00 |
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