Novellus Systems  BB10-155942波纹管执行器 PDF资料

1.产 品 资 料 介 绍：

Novellus Systems BB10-155942 是 Novellus（后被 Lam Research 收购）设备上用的一个波纹管执行器，属于真空传输或工艺腔体里的动作执行部件。

它有哪些特点

1. Novellus Systems 原厂件，专为自家半导体设备配套

2. 波纹管执行器，用波纹管做密封，动作时能保持真空不泄漏

3. 把驱动动作传进真空腔体，同时隔绝外界大气

4. 密封性好，适合高真空环境

5. 动作精度高，能带阀门、挡板等部件精准动作

6. 耐疲劳，波纹管能承受反复伸缩

7. 材质耐腐蚀，能兼容工艺气体环境

8. 结构紧凑，方便装在腔体接口上

9. 工业级设计，能长时间连续运行

10. 市面有流通，二手和库存件都能找到

都用在哪些地方

1. Novellus 半导体制造设备

2. 真空腔体的阀门和挡板驱动

3. 等离子蚀刻和 CVD 设备

4. 物理气相沉积系统

5. 其他需要真空密封动作的工艺场景

总的来说，Novellus Systems BB10-155942 就是一款波纹管执行器，负责把动作传进真空腔体里，同时靠波纹管把真空封住，是半导体真空设备里管密封驱动的关键部件。

Novellus Systems  BB10-155942波纹管执行器  英文介绍

Novellus Systems BB10-155942 is a bellows actuator used in Novellus (later acquired by Lam Research) equipment, which belongs to the action execution components in vacuum transmission or process chambers.

What are its characteristics

Novellus Systems original parts, specially designed to match their own semiconductor equipment

Bellows actuator, sealed with bellows, can maintain vacuum without leakage during operation

Transmit the driving action into the vacuum chamber while isolating the external atmosphere

Good sealing performance, suitable for high vacuum environment

High precision in action, capable of precise movement of components such as valves and baffles

Fatigue resistant, corrugated tube can withstand repeated expansion and contraction

The material is corrosion-resistant and compatible with process gas environments

Compact structure, easy to install on the cavity interface

Industrial grade design, capable of long-term continuous operation

There is circulation in the market, and both second-hand and inventory parts can be found

Where are they used

Novellus Semiconductor Manufacturing Equipment

Valve and baffle drive for vacuum chamber

Plasma etching and CVD equipment

Physical vapor deposition system

Other process scenarios that require vacuum sealing action

In general, Novellus Systems BB10-155942 is a bellows actuator that is responsible for transmitting actions into a vacuum chamber and sealing the vacuum with bellows. It is a key component of the tube sealing drive in semiconductor vacuum equipment.

Novellus Systems  BB10-155942波纹管执行器 产品图片

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型号：Novellus Systems  BB10-155942波纹管执行器

质保：一年

成色：全新/二手

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