Nikon NSR-S208D双光学镜头组件 PDF资料
Nikon NSR-S208D 双光学镜头组件是尼康(Nikon)光刻机上的一个光学部件,属于 NSR 系列光刻设备的镜头系统组成部分。
它有哪些特点
尼康出品,NSR 系列是尼康经典的步进扫描光刻机平台
双光学镜头结构,属于光刻机成像系统的核心部件
光学精度极高,满足光刻工艺对成像分辨率的要求
镜片材料和镀膜工艺都是顶级水准
工作波长对应紫外光刻工艺
洁净度要求极严,装配和维修都要在超净环境里做
热稳定性好,长时间曝光不会因为发热跑焦
振动控制好,保证曝光过程中图像不抖
属于光刻机里最精密、最贵的部件之一
市面有流通,二手和库存件都能找到
都用在哪些地方
尼康 NSR-S208D 光刻机
半导体晶圆制造的光刻工艺
需要高分辨率成像的曝光环节
其他尼康 NSR 系列光刻设备
半导体前道制程的图形转移工序
总的来说,Nikon NSR-S208D 双光学镜头组件就是尼康光刻机上的成像镜头部件,负责把掩膜版上的图形精准地投影到晶圆上,是光刻工艺里管成像的关键光学部件。
The Nikon NSR-S208D dual optical lens assembly is an optical component on Nikon lithography machines and is part of the lens system of the NSR series lithography equipment.
What are its characteristics
Produced by Nikon, the NSR series is Nikon's classic step scan lithography platform
Dual optical lens structure, belonging to the core component of lithography imaging system
Extremely high optical accuracy, meeting the imaging resolution requirements of photolithography technology
The lens material and coating process are of the highest level
Working wavelength corresponds to UV lithography process
The cleanliness requirements are extremely strict, and assembly and maintenance must be carried out in an ultra clean environment
Good thermal stability, long-term exposure will not cause defocusing due to heat generation
Control the vibration well to ensure that the image does not shake during the exposure process
One of the most precise and expensive components in lithography machines
There is circulation in the market, and both second-hand and inventory parts can be found
Where are they used
Nikon NSR-S208D Lithography Machine
Photolithography process for semiconductor wafer manufacturing
Exposure process requiring high-resolution imaging
Other Nikon NSR series lithography equipment
The graphic transfer process of semiconductor pre-processing
In general, the Nikon NSR-S208D dual optical lens assembly is the imaging lens component on Nikon lithography machines, responsible for accurately projecting the patterns on the mask onto the wafer. It is a key optical component for tube imaging in lithography processes.

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4.其他产品
UAC389AE01 HIEE300888R0001 Logical Sequence Card
UFC784AE101 3BHE003688R0101 Pulse input card
UNS 0883A-P,V1 3BHB006208R0001 I/O PCB assembled
| PMB33F-10116-01 | CACR-1E-AM1VA-E | R23GENA-R1-NS-VS-01 |
| PMB33F-10116-00 | 6DD1681-0EA0 | R35KMNC-TS-RC-NV-02 |
| PMB33F-10114-03 | Gespac GESSMC-2-9419 | R45-GENA-R2-NS-NV-00 |
| PMB33F-10114-02 | Gespac GESSIO-12 9921 GESPCB-436 | R35KENT-TS-M1-NV-00 |
| PMB33F-10114-01 | 70AB02B-E | R35KENC-R2-NS-VS-00 |
| PMB33F-10114-00 | 70BT01C | R45HCNA-TS-NF-NV-00 |
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