AMAT 0190-15168能源射频匹配器 PDF资料

1.产 品 资 料 介 绍：

AMAT 0190-15168 是应用材料（AMAT）设备上用的一个射频匹配器，负责把射频电源和等离子腔体之间的阻抗调匹配。

它有哪些特点

1. AMAT 原厂配套件，专为 AMAT 半导体设备设计

2. 射频匹配器，属于自动匹配网络

3. 负责把射频发生器的输出阻抗和等离子腔体的负载阻抗调匹配

4. 减少反射功率，让射频能量高效送进腔体

5. 匹配速度快，能跟上等离子负载的快速变化

6. 调节精度高，保证工艺稳定可重复

7. 工业级设计，能长时间连续运行

8. 结构紧凑，方便集成在设备机箱内

9. 保护功能齐全，异常时能自动保护

10. 市面有流通，二手和库存件都能找到

都用在哪些地方

1. AMAT 半导体制造设备

2. 等离子蚀刻工艺

3. 等离子增强化学气相沉积

4. 物理气相沉积系统

5. 其他需要射频等离子处理的真空设备

总的来说，AMAT 0190-15168 就是 AMAT 设备里的一款射频匹配器，负责把射频电源和等离子腔体之间的阻抗调好，让能量高效送进去、减少反射，是半导体设备射频链路里的关键部件。

AMAT 0190-15168能源射频匹配器  英文介绍

AMAT 0190-15168 is an RF matching device used in Applied Materials (AMAT) equipment, responsible for impedance matching between RF power supply and plasma chamber.

What are its characteristics

AMAT original factory kit, designed specifically for AMAT semiconductor equipment

RF matching device, belonging to automatic matching network

Responsible for matching the output impedance of the RF generator with the load impedance of the plasma chamber

Reduce reflected power to efficiently deliver RF energy into the cavity

Fast matching speed, able to keep up with the rapid changes in plasma load

High adjustment accuracy ensures stable and repeatable process

Industrial grade design, capable of long-term continuous operation

Compact structure, easy to integrate into equipment chassis

Fully equipped with protection functions, capable of automatic protection in case of abnormalities

There is circulation in the market, and both second-hand and inventory parts can be found

Where are they used

AMAT Semiconductor Manufacturing Equipment

Plasma etching process

Plasma enhanced chemical vapor deposition

Physical vapor deposition system

Other vacuum equipment that requires RF plasma treatment

In general, AMAT 0190-15168 is an RF matching device in AMAT equipment, responsible for adjusting the impedance between the RF power supply and the plasma chamber, allowing energy to be efficiently delivered and reducing reflection. It is a key component in the RF link of semiconductor equipment.

AMAT 0190-15168能源射频匹配器 产品图片

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型号：AMAT 0190-15168能源射频匹配器

质保：一年

成色：全新/二手

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