AE 3155999-080射频匹配组件 PDF资料

1.产 品 资 料 介 绍：

AE 3155999-080 是 Advanced Energy（AE）生产的一款射频匹配组件，属于自动匹配网络，用在半导体等离子设备里做阻抗匹配。

它有哪些特点

1. AE 出品，这家在射频电源和匹配网络领域是行业标杆

2. 自动匹配网络，负责把射频发生器的输出阻抗和等离子腔体的负载阻抗调匹配

3. 属于 Navigator 系列平台，跟 AE 的射频发生器配套使用

4. 减少反射功率，让射频能量高效送进腔体

5. 匹配速度快，能跟上等离子工艺中负载的快速变化

6. 调节精度高，保证工艺过程稳定可重复

7. 工业级设计，能长时间连续运行

8. 结构紧凑，方便集成在设备机箱内

9. 保护功能齐全，异常情况下能自动保护

10. 市面有流通，二手、翻新和库存件都能找到

都用在哪些地方

1. 半导体制造设备

2. 等离子蚀刻工艺

3. 等离子增强化学气相沉积

4. 物理气相沉积系统

5. 其他需要 13.56 MHz 射频等离子处理的真空设备

总的来说，AE 3155999-080 就是 AE 的一款射频匹配组件，负责把射频电源和等离子腔体之间的阻抗调好，让能量高效送进去、减少反射，是半导体设备射频链路里的关键部件。

AE 3155999-080射频匹配组件  英文介绍

AE 3155999-080 is an RF matching component produced by Advanced Energy (AE), which belongs to the automatic matching network and is used for impedance matching in semiconductor plasma equipment.

What are its characteristics

Produced by AE, this company is a benchmark in the field of RF power supply and matching networks

Automatic matching network, responsible for matching the output impedance of the RF generator with the load impedance of the plasma chamber

Belonging to the Navigator series platform, it is used in conjunction with AE's RF generator

Reduce reflected power to efficiently deliver RF energy into the cavity

Fast matching speed, able to keep up with the rapid changes in load in plasma technology

High adjustment accuracy ensures stable and repeatable process

Industrial grade design, capable of long-term continuous operation

Compact structure, easy to integrate into equipment chassis

Fully equipped with protection functions, capable of automatic protection in case of abnormal situations

There is circulation in the market, and second-hand, refurbished, and inventory parts can be found

Where are they used

Semiconductor manufacturing equipment

Plasma etching process

Plasma enhanced chemical vapor deposition

Physical vapor deposition system

Other vacuum equipment requiring 13.56 MHz RF plasma treatment

In general, AE 3155999-080 is an RF matching component of AE, responsible for adjusting the impedance between the RF power supply and the plasma chamber to efficiently deliver energy and reduce reflection. It is a key component in the RF link of semiconductor equipment.

AE 3155999-080射频匹配组件 产品图片

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型号：AE 3155999-080射频匹配组件

质保：一年

成色：全新/二手

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