ENI OEM-6A-11491-51固态发电机 PDF资料

1.产 品 资 料 介 绍：

ENI OEM-6A-11491-51 是 ENI（现属 MKS Instruments）生产的一款固态发生器，属于射频电源类产品，常用在半导体和等离子工艺设备里提供射频能量。

它有哪些特点

1. ENI 出品，这家在射频电源和匹配网络领域是老牌厂商，后被 MKS 收购

2. 固态设计，没有传统电子管，寿命长、稳定性好

3. 属于 OEM-6A 系列，是为设备厂商定制的板载式电源模块

4. 输出功率等级在 600W 左右，适合中等功率射频工艺

5. 工作频率通常是 13.56 MHz，半导体等离子工艺的标准频率

6. 体积紧凑，直接集成在设备机箱内

7. 转换效率高，发热相对小

8. 输出稳定，能长时间连续运行

9. 保护功能齐全，过压、过流、过温都有

10. 市面有流通，二手和库存件都能找到

都用在哪些地方

1. 半导体制造设备，给等离子工艺供射频能量

2. 等离子蚀刻和清洗设备

3. 等离子增强化学气相沉积系统

4. 物理气相沉积设备

5. 其他需要稳定射频输出的真空工艺场景

总的来说，ENI OEM-6A-11491-51 就是一款板载式固态射频发生器，负责给等离子工艺提供稳定的射频能量，是半导体设备射频链路里的关键电源部件。

ENI OEM-6A-11491-51固态发电机  英文介绍

ENI OEM-6A-11491-51 is a solid-state generator produced by ENI (now MKS Instruments), which belongs to the RF power supply category and is commonly used in semiconductor and plasma process equipment to provide RF energy.

What are its characteristics

Produced by ENI, a well-established manufacturer in the field of RF power supplies and matching networks, which was later acquired by MKS

Solid state design, without traditional electronic tubes, with long lifespan and good stability

Belonging to the OEM-6A series, it is an onboard power module customized for equipment manufacturers

The output power level is around 600W, suitable for medium power RF processes

The operating frequency is usually 13.56 MHz, which is the standard frequency for semiconductor plasma processes

Compact in size, directly integrated into the device chassis

High conversion efficiency and relatively low heat generation

Stable output, able to run continuously for a long time

Complete protection functions, including overvoltage, overcurrent, and overtemperature

There is circulation in the market, and both second-hand and inventory parts can be found

Where are they used

Semiconductor manufacturing equipment supplies RF energy to plasma processes

Plasma etching and cleaning equipment

Plasma enhanced chemical vapor deposition system

Physical vapor deposition equipment

Other vacuum process scenarios that require stable RF output

Overall, ENI OEM-6A-11491-51 is an onboard solid-state RF generator responsible for providing stable RF energy to plasma processes, and is a critical power component in the RF link of semiconductor equipment.

ENI OEM-6A-11491-51固态发电机 产品图片

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型号：ENI OEM-6A-11491-51固态发电机

质保：一年

成色：全新/二手

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