TEL 2L80-001716-11 加热器控制器箱 PDF资料

1.产 品 资 料 介 绍：

TEL 2L80-001716-11 是 Tokyo Electron（TEL）设备上用的一个加热器控制器箱，属于温控单元，负责给工艺腔体或管路做加热控制。

它有哪些特点

1. TEL 原厂配套件，专为 TEL 半导体设备设计

2. 加热器控制器箱，内部集成加热控制电路

3. 负责一路或多路加热器的温度调节

4. 配合温度传感器做闭环控制，温度稳

5. 控温精度高，满足半导体工艺的严格要求

6. 模块化箱体结构，方便机架安装和更换

7. 工业级设计，能长时间连续运行

8. 市面有流通，二手和库存件都能找到

9. 通常用在 TEL 的 CVD、蚀刻或扩散设备上

10. 属于设备温控系统里的关键部件

都用在哪些地方

1. TEL 半导体制造设备

2. 等离子增强化学气相沉积工艺

3. 蚀刻工艺的腔体和管路加热

4. 扩散炉和热处理设备

5. 其他需要精准温控的真空工艺场景

总的来说，TEL 2L80-001716-11 就是 TEL 设备里管加热的控制器箱，负责把工艺腔体或管路的温度稳住，是半导体制造中温控环节的一个关键部件。

TEL 2L80-001716-11 加热器控制器箱   英文介绍

TEL 2L80-001716-11 is a heater controller box used on Tokyo Electron (TEL) equipment, which belongs to the temperature control unit and is responsible for heating control of process chambers or pipelines.

What are its characteristics

TEL original factory kit, designed specifically for TEL semiconductor equipment

Heater controller box, with integrated heating control circuit inside

Responsible for temperature regulation of one or multiple heaters

Cooperate with temperature sensors for closed-loop control, ensuring stable temperature

High temperature control accuracy, meeting the strict requirements of semiconductor processes

Modular box structure, convenient for rack installation and replacement

Industrial grade design, capable of long-term continuous operation

There is circulation in the market, and both second-hand and inventory parts can be found

Usually used in TEL's CVD, etching, or diffusion equipment

Belonging to the key components of the device temperature control system

Where are they used

TEL Semiconductor Manufacturing Equipment

Plasma enhanced chemical vapor deposition process

Heating of chambers and pipelines in etching process

Diffusion furnace and heat treatment equipment

Other vacuum process scenarios that require precise temperature control

In general, TEL 2L80-001716-11 is the controller box for tube heating in TEL equipment, responsible for stabilizing the temperature of the process chamber or pipeline, and is a key component in the temperature control process of semiconductor manufacturing.

TEL 2L80-001716-11 加热器控制器箱 产品图片

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型号：TEL 2L80-001716-11 加热器控制器箱

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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