Kawasaki 3NS004S-C019晶圆预对准器 PDF资料

1.产 品 资 料 介 绍：

Kawasaki 3NS004S-C019 是川崎（Kawasaki）生产的一款晶圆预对准器，用在半导体设备里，负责在片子进工艺腔之前把位置和角度校准好。

它有哪些特点

1. 川崎出品，这家在半导体搬运和校准设备上做了很多年

2. 预对准器，专门负责在传片之前把晶圆的圆心和缺口方向找正

3. 用光学传感器找晶圆边缘和缺口，定位准

4. 校准完把片子放到正确位置，后面机械手抓取就不会偏

5. 定位精度高，能到微米级别

6. 适配主流晶圆尺寸，300mm 的片子没问题

7. 洁净设计，符合半导体产线的颗粒控制要求

8. 结构紧凑，装在 EFEM 或设备前端不占地方

9. 响应快，对准节拍短，不拖整台设备的生产效率

10. 稳定性好，产线上长时间跑不容易出故障

都用在哪些地方

1. 半导体制造设备的前端模块，片子从 FOUP 出来先在这校准

2. 蚀刻、CVD、PVD 等工艺设备的传片环节

3. 晶圆搬运机械手的前道工位，校准完再交给机械手

4. 量测和检测设备，片子进检测腔之前要先把位置摆正

5. 其他需要晶圆精准定位的真空或大气传输场景

总的来说，Kawasaki 3NS004S-C019 就是川崎的一款晶圆预对准器，专门在片子进工艺之前把圆心和缺口方向校正好，保证后面机械手抓得准、放得正，是半导体传片环节里管定位校准的关键部件。

Kawasaki 3NS004S-C019晶圆预对准器   英文介绍

Kawasaki 3NS004S-C019 is a wafer pre aligner produced by Kawasaki, used in semiconductor equipment to calibrate the position and angle of the wafer before it enters the process chamber.

What are its characteristics

Produced by Kawasaki, this company has been working on semiconductor handling and calibration equipment for many years

Pre aligner, specifically responsible for aligning the center of the wafer and the direction of the notch before wafer transfer

Using optical sensors to locate wafer edges and gaps accurately

After calibration, place the film in the correct position, and the mechanical arm will not deviate when grabbing it later

High positioning accuracy, capable of reaching micrometer level

Compatible with mainstream wafer sizes, 300mm wafers are fine

Clean design that meets the particle control requirements of semiconductor production lines

Compact structure, installed on EFEM or device front end without taking up space

Fast response, short alignment pace, and no delay in the production efficiency of the entire equipment

Good stability, the production line runs for a long time and is not prone to malfunctions

Where are they used

The front-end module of semiconductor manufacturing equipment is calibrated here before the wafer comes out of FOUP

The transfer process of etching, CVD, PVD and other process equipment

The front workstation of the wafer handling robot is calibrated and then handed over to the robot

Measurement and testing equipment, the position of the film should be adjusted before entering the testing chamber

Other vacuum or atmospheric transmission scenarios that require precise wafer positioning

In general, Kawasaki 3NS004S-C019 is a wafer pre alignment device from Kawasaki, which is designed to calibrate the center and notch direction of the wafer before it enters the process, ensuring that the mechanical arm can grasp and place it correctly. It is a key component for tube positioning calibration in the semiconductor wafer transfer process.

Kawasaki 3NS004S-C019晶圆预对准器 产品图片

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型号：Kawasaki 3NS004S-C019晶圆预对准器

质保：一年

成色：全新/二手

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