Sinfonia Technology SCE92100137晶圆机器人 PDF资料

1.产 品 资 料 介 绍：

Sinfonia Technology SCE92100137 是神钢电机（Sinfonia Technology，原新光电气）生产的一款双臂晶圆搬运机器人，专门用在半导体设备里负责传片子。

它有哪些特点

1. 双臂结构，两只手可以同时或交替搬运晶圆，效率高

2. 原厂配套件，Sinfonia 本身就是给 TEL 等大厂做配套的，兼容性好

3. 适配 300mm 主流晶圆，现在产线上跑的基本都是这个尺寸

4. 洁净度很高，半导体产线对颗粒污染要求极严，它能扛住这个标准

5. 可靠性好，产线上机器人一停就是大事故，这款在稳定性上口碑不错

6. 振动控制好，搬运时片子不容易被抖坏

7. 定位精度高，放片子准头很足

8. 体积紧凑，装在设备里面不占太多地方

9. 支持自动校准，维护之后不用重新教位置，省事

10. 真空环境也能用，Sinfonia 在真空搬运机器人这块是行业老手

都用在哪些地方

1. TEL 蚀刻设备，这个型号就是从 TEL 的 T-3044SS 蚀刻系统上拆下来的，原配就是干这个的

2. 半导体制造设备内部搬运，蚀刻、CVD、PVD 这些工艺腔体之间传片子都靠它

3. EFEM 前端模块，跟设备前端模块配合，把片子从 FOUP 里送进送出

4. 真空平台，Sinfonia 的真空机器人在真空腔体里做晶圆搬运是主力产品之一

5. 晶圆储片机，从传送盒里取片子放到片架上，或者反过来，都行

总的来说，SCE92100137 就是 Sinfonia 给 TEL 等半导体设备厂配套的双臂搬运机器人，专门在产线设备里面传 300mm 晶圆，洁净、精准、可靠，是设备里管搬片子这个活的关键部件。

Sinfonia Technology SCE92100137晶圆机器人   英文介绍

Sinfonia Technology SCE92100137 is a dual arm wafer handling robot produced by Sinfonia Technology (formerly known as Shin Kong Electric), specifically designed for transferring wafers in semiconductor equipment.

What are its characteristics

Dual arm structure, both hands can simultaneously or alternately transport wafers, high efficiency

Original factory kit, Sinfonia itself is designed to match large factories such as TEL, with good compatibility

Compatible with mainstream 300mm wafers, this size is mostly used on production lines now

The cleanliness is very high, and the semiconductor production line has extremely strict requirements for particle pollution. It can withstand this standard

Good reliability, if the robot on the production line stops, it will cause a major accident. This model has a good reputation for stability

Good vibration control ensures that the film is not easily damaged by shaking during transportation

High positioning accuracy and sufficient accuracy for film placement

Compact in size, not taking up too much space when installed inside the equipment

Support automatic calibration, no need to re teach the position after maintenance, saving time

It can also be used in a vacuum environment. Sinfonia is an industry veteran in the field of vacuum handling robots

Where are they used

TEL etching equipment, this model was removed from TEL's T-3044SS etching system, and the original equipment was designed for this purpose

The internal handling of semiconductor manufacturing equipment, as well as the transfer of wafers between process chambers such as etching, CVD, and PVD, all rely on it

EFEM front-end module, in conjunction with the device front-end module, sends chips in and out of FOUP

Vacuum platform, Sinfonia's vacuum robot is one of the main products for wafer handling in vacuum chambers

Wafer storage machine, which takes wafers from the transfer box and places them on the wafer rack, or vice versa

In general, SCE92100137 is a dual arm handling robot provided by Sinfonia to semiconductor equipment factories such as TEL. It is specialized in transferring 300mm wafers in production line equipment, which is clean, precise, and reliable. It is a key component for handling wafers in equipment.

Sinfonia Technology SCE92100137晶圆机器人 产品图片

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型号：Sinfonia Technology SCE92100137晶圆机器人

质保：一年

成色：全新/二手

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