TURBOVAC 800052V0001涡轮分子泵 PDF资料

1.产 品 资 料 介 绍：

TURBOVAC 800052V0001 是德国莱宝（Leybold）生产的一款涡轮分子泵，具体型号是 TURBOVAC TW 690 MS，属于宽量程复合分子泵。

它有哪些特点

1. 德国莱宝（Leybold）制造，原 Oerlikon Leybold 品牌

2. 具体型号是 TURBOVAC TW 690 MS，属于 TW 700 级别的平台

3. 宽量程复合分子泵，既有传统涡轮叶片级，后端还带分子拖曳级（Holweck/Gaede 结构）

4. 抽速方面，对 N₂/Ar 约 680 L/s，He 约 530 L/s，H₂ 约 300 L/s

5. 额定转速 48,000 rpm，启动时间约 5 分钟

6. 进气口法兰 DN 160 ISO-K，前级口 NW25

7. 允许的最大前级压力是 14 mbar，比普通分子泵更宽容

8. 需要配莱宝 TD 690 MS 控制器（或 TURBO.DRIVE 700 系列）来驱动

9. 工作电压标称 59 VDC，功耗最高约 500 W

10. 重量约 16.5 kg，风冷噪音低于 47 dB(A)

都用在哪些地方

1. 半导体制造设备，比如蚀刻、CVD、PVD 等工艺的真空系统

2. 质谱分析仪器，有资料显示它被用在 Applied Biosystems 的 QSTAR Elite LC/MS/MS 系统上

3. 需要高真空或超高真空的研发和实验室设备

4. 真空镀膜和表面处理设备

5. 其他需要宽量程、能应对较高气体负载的真空场景

总的来说，TURBOVAC 800052V0001（TW 690 MS）就是莱宝的一款宽量程复合分子泵，抽速够大、前级容忍度高，适合半导体设备和分析仪器里要求稳定高真空的场合。

TURBOVAC 800052V0001涡轮分子泵   英文介绍

TURBOVAC 800052V0001 is a turbo molecular pump produced by Leybold, Germany. The specific model is TURBOVAC TW 690 MS, which belongs to a wide range composite molecular pump.

What are its characteristics

Made in Leybold, Germany, formerly Oerlikon Leybold brand

The specific model is TURBOVAC TW 690 MS, which belongs to the TW 700 level platform

Wide range composite molecular pump, with both traditional turbine blade stage and molecular drag stage (Holweck/Kaede structure) at the rear end

In terms of pumping speed, N ₂/Ar is about 680 L/s, He is about 530 L/s, and H ₂ is about 300 L/s

Rated speed of 48000 rpm, starting time of about 5 minutes

Inlet flange DN 160 ISO-K, front stage port NW25

The maximum allowable pre stage pressure is 14 mbar, which is more tolerant than ordinary molecular pumps

Need to be equipped with a Leybold TD 690 MS controller (or TURBO.DRIVE 700 series) to drive it

The nominal operating voltage is 59 VDC, with a maximum power consumption of approximately 500 W

Weight approximately 16.5 kg, air-cooled noise below 47 dB (A)

Where are they used

Semiconductor manufacturing equipment, such as vacuum systems for etching, CVD, PVD and other processes

Mass spectrometry analysis instrument, data shows that it is used on the QSTAR Elite LC/MS/MS system of Applied Biosystems

Research and laboratory equipment requiring high or ultra-high vacuum

Vacuum coating and surface treatment equipment

Other vacuum scenarios that require a wide range and the ability to handle high gas loads

Overall, TURBOVAC 800052V0001 (TW 690 MS) is a wide range composite molecular pump from Leybold, with sufficient pumping speed and high tolerance in the front stage, suitable for applications requiring stable high vacuum in semiconductor equipment and analytical instruments.

TURBOVAC 800052V0001涡轮分子泵 产品图片

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型号：TURBOVAC 800052V0001涡轮分子泵

质保：一年

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