Nihon Koshuha AMC-9501G01射频调谐器组件 PDF资料

1.产 品 资 料 介 绍：

Nihon Koshuha AMC-9501G01 是一款射频调谐器组件，也叫 RF Tuner Assembly，用于半导体和等离子处理设备中做阻抗匹配。

它有哪些特点

1. 日本 Nihon Koshuha（日本高周波）生产，这家公司专做微波和射频匹配器

2. 属于自动匹配调谐器，负责把射频电源和等离子腔体之间的阻抗调匹配

3. 和 Tokyo Electron（TEL）的设备配套用，TEL 零件号是 3C80-000278-11

4. 装在 TEL Trias CVD 系统上，是从那上面拆下来的

5. 内部带波导射频组件，零件号 AMC-02N4E03DK-50R02

6. 市面有流通，二手和全新库存都有

都用在哪些地方

1. Tokyo Electron（TEL）的 Trias CVD 系统

2. 半导体制造中的等离子增强化学气相沉积工艺

3. 需要微波或射频等离子处理的真空设备

总的来说，AMC-9501G01 就是 TEL 设备上用的一个射频调谐器，负责把射频能量高效地送进等离子腔体，是 CVD 工艺里管阻抗匹配的关键部件。

Nihon Koshuha AMC-9501G01射频调谐器组件   英文介绍

Nihon Koshuha AMC-9501G01 is an RF tuner assembly, also known as RF Tuner Assembly, used for impedance matching in semiconductor and plasma processing equipment.

What are its characteristics

Produced by Nihon Koshuha in Japan, this company specializes in microwave and RF matching devices

Belonging to the automatic matching tuner, responsible for matching the impedance between the RF power supply and the plasma cavity

Used in conjunction with Tokyo Electron (TEL) equipment, TEL part number is 3C80-000278-11

Installed on the TEL Trias CVD system, it was removed from there

Internal waveguide RF component, part number AMC-02N4E03DK-50R02

There is circulation in the market, with both second-hand and brand new inventory available

Where are they used

Trias CVD system from Tokyo Electron (TEL)

Plasma enhanced chemical vapor deposition process in semiconductor manufacturing

Vacuum equipment requiring microwave or radio frequency plasma treatment

Overall, AMC-9501G01 is an RF tuner used in TEL equipment, responsible for efficiently delivering RF energy into the plasma chamber. It is a key component for impedance matching in CVD processes.

Nihon Koshuha AMC-9501G01射频调谐器组件 产品图片

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型号：Nihon Koshuha AMC-9501G01射频调谐器组件

质保：一年

成色：全新/二手

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