AMAT 0190-38391射频发生器 PDF资料
AMAT 0190-38391 是应用材料（AMAT）设备上用的一个射频发生器，实际是日本 Daihen 代工的，对应型号 NX-AGA-30F。
它有哪些特点
大功率射频输出，给等离子工艺供能
自带自动匹配功能，省心
日本 Daihen 制造，质量稳定
三相 200V 输入，30A
专为 AMAT 半导体设备配套设计
结构紧凑，适合机架安装
工作效率高，输出稳定
都用在哪些地方
AMAT 半导体制造设备
等离子蚀刻工艺
等离子增强化学气相沉积
物理气相沉积系统
真空镀膜和表面处理设备
总的来说，AMAT 0190-38391 就是 AMAT 设备上用的射频电源，负责给等离子工艺提供稳定的射频能量，是半导体制造中比较关键的一个部件。
AMAT 0190-38391 is an RF generator used in Applied Materials (AMAT) equipment, which is actually manufactured by Daihen in Japan and corresponds to the model NX-AGA-30F.
What are its characteristics
High power RF output to power plasma processes
Equipped with automatic matching function, worry free
Made in Daihen, Japan, with stable quality
Three phase 200V input, 30A
Specially designed for AMAT semiconductor equipment matching
Compact structure, suitable for rack installation
High work efficiency and stable output
Where are they used
AMAT Semiconductor Manufacturing Equipment
Plasma etching process
Plasma enhanced chemical vapor deposition
Physical vapor deposition system
Vacuum coating and surface treatment equipment
Overall, AMAT 0190-38391 is the RF power supply used in AMAT equipment, responsible for providing stable RF energy to plasma processes and is a critical component in semiconductor manufacturing.
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