MKS 925-11004-0087 传感器 PDF资料
1.产 品 资 料 介 绍：
MKS 925-11004-0087 是一款基于MEMS技术的紧凑型皮拉尼真空传感器，凭借其高精度、宽量程和坚固设计，在工业真空测量中表现优异。以下是该型号的核心特点与应用领域：
产品特点
采用MEMS微机电系统技术，基于热导率原理进行真空测量。
测量范围宽，从1.0×10⁻⁵ Torr 至大气压。
无对流效应设计，可任意方向安装，不影响精度。
固态结构坚固，抗振动、耐大气冲击，不易损坏。
提供1~9 VDC模拟电压输出，分辨率高。
支持RS232、RS485数字通信，便于数据读取与配置。
可选配设定点继电器，实现外部设备的自动控制与互锁。
内置多种气体校准曲线，可通过软件切换补偿气体类型差异。
应用领域
真空系统的基础压力监测。
前级管道与粗抽阶段的真空测量。
真空腔室的气体回填压力控制。
质谱仪的真空环境监测与保障。
超高真空规管的启动与低真空段信号参考。
半导体制造工艺中的真空过程控制。
工业镀膜与薄膜沉积设备中的压力监控。
冷冻干燥、分析仪器及科研实验中的真空测量。
结尾
综上所述，MKS 925-11004-0087 以其高集成度、灵活接口和可靠的固态性能，成为从粗真空到高真空各类应用场景中值得信赖的压力测量解决方案
MKS 925-11004-0087 is a compact Pirani vacuum sensor based on MEMS technology, which performs excellently in industrial vacuum measurement due to its high precision, wide range, and robust design. The following are the core features and application areas of this model:
Product Features
Using MEMS microelectromechanical system technology, vacuum measurement is carried out based on the principle of thermal conductivity.
The measurement range is wide, from 1.0 × 10 ⁻⁵ Torr to atmospheric pressure.
No convection effect design, can be installed in any direction without affecting accuracy.
Solid state structure is sturdy, resistant to vibration and atmospheric impact, and not easily damaged.
Provide analog voltage output of 1-9 VDC with high resolution.
Supports RS232 and RS485 digital communication for easy data reading and configuration.
Optional set point relay can be configured to achieve automatic control and interlocking of external devices.
Built in multiple gas calibration curves, which can compensate for gas type differences through software switching.
Application Domain
Basic pressure monitoring of vacuum system.
Vacuum measurement of the front-end pipeline and roughing stage.
Control of gas backfill pressure in vacuum chamber.
Vacuum environment monitoring and assurance of mass spectrometer.
The start-up of ultra-high vacuum gauge and reference for low vacuum section signals.
Vacuum process control in semiconductor manufacturing technology.
Pressure monitoring in industrial coating and thin film deposition equipment.
Vacuum measurement in freeze-drying, analytical instruments, and scientific research experiments.
ending
In summary, MKS 925-11004-0087, with its high integration, flexible interface, and reliable solid-state performance, has become a reliable pressure measurement solution for various application scenarios from rough vacuum to high vacuum
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