MKS GS53-F05F07-HT 真空泵执行器组件 PDF资料
1.产 品 资 料 介 绍：
MKS GS53-F05F07-HT 真空泵执行器组件是MKS Instruments旗下专为半导体设备设计的真空管路控制执行器，以下为其核心特点与应用领域概述。
产品特点
采用弹簧复位结构，断气可自动关闭管路。
兼容F05、F07规格真空球阀。
具备耐高温密封件，适配加热腔体工况。
主体采用耐腐蚀铝合金材质，洁净无析出。
采用耐腐蚀氟橡胶密封，适配各类工艺气体。
支持90度精准开关，可调行程范围。
自带阀位反馈，可上传开关信号至主控。
适配标准洁净压缩空气驱动。
产品应用领域
用于MKS品牌真空泵的配套控制。
适配应用材料等半导体设备厂商的刻蚀与镀膜机台。
用于半导体真空管路系统的通断控制。
适配晶圆制造车间的洁净环境要求。
用于高真空和超高真空工艺场景。
用于需要快速响应和安全联锁的真空系统。
用于抗射频干扰和信号稳定的工艺节点。
用于半导体产线维保与备件替换。
结尾
MKS GS53-F05F07-HT 真空泵执行器组件具有耐高温、耐腐蚀、反馈可靠等特点，适用于半导体刻蚀与镀膜设备的真空管路通断控制场景。
MKS GS53-F05F07-HT 真空泵执行器组件 英文介绍
The MKS GS53-F05F07-HT vacuum pump actuator component is a vacuum pipeline control actuator designed specifically for semiconductor equipment under MKS Instruments. The following is an overview of its core features and application areas.
Product Features
Adopting a spring reset structure, the pipeline can be automatically closed when the gas is cut off.
Compatible with F05 and F07 specification vacuum ball valves.
Equipped with high-temperature resistant sealing components, suitable for heating chamber conditions.
The main body is made of corrosion-resistant aluminum alloy material, which is clean and free of precipitation.
Adopting corrosion-resistant fluororubber sealing, suitable for various process gases.
Support 90 degree precise switch and adjustable travel range.
Equipped with valve position feedback, it can upload switch signals to the main control.
Compatible with standard clean compressed air drive.
Product application areas
Used for matching control of MKS brand vacuum pumps.
Suitable for semiconductor equipment manufacturers' etching and coating machines for application materials.
Used for on-off control of semiconductor vacuum piping systems.
Adapt to the clean environment requirements of wafer manufacturing workshops.
Used in high vacuum and ultra-high vacuum process scenarios.
Used for vacuum systems that require rapid response and safety interlock.
Used for process nodes that resist radio frequency interference and ensure signal stability.
Used for semiconductor production line maintenance and spare parts replacement.
ending
The MKS GS53-F05F07-HT vacuum pump actuator component has the characteristics of high temperature resistance, corrosion resistance, and reliable feedback, and is suitable for vacuum pipeline on/off control scenarios in semiconductor etching and coating equipment.
MKS GS53-F05F07-HT 真空泵执行器组件 产品图片
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| EP3758-5151-7-56BC-CU | 531X124MSDAJG1 | 63-0050-02 |
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