Hitachi M-05A2LS-400K 射频控制器 PDF资料 

1.产 品 资 料 介 绍：

Hitachi M-05A2LS-400K 射频控制器简介

Hitachi M-05A2LS-400K是日立制造的一款射频匹配箱组件，用于半导体刻蚀设备中实现射频电源与反应腔室之间的阻抗匹配。

产品特点（8条）

1. 日立原厂制造，专为半导体刻蚀设备配套

2. 射频匹配箱，具备自动阻抗匹配功能

3. 型号中标配RBD3.1配置版本标识

4. 带CE认证标志，符合安全规范要求

5. 模块化设计，便于安装与维护更换

6. 自动匹配确保等离子体稳定运行

7. 工业级元器件，支持长期连续运行

8. 专为日立半导体刻蚀设备平台设计

主要应用领域（8条）

1. 半导体刻蚀设备，用于浅槽刻蚀系统

2. 微波等离子体刻蚀系统，适配M-511E设备

3. 介质刻蚀工艺，匹配腔室阻抗变化

4. 硅通孔刻蚀，保障高深宽比工艺稳定

5. 晶圆制造产线，作为刻蚀核心射频组件

6. 等离子体清洗设备，提供稳定射频传输

7. 设备维保更换，替换老旧匹配器

8. 设备翻新升级，配套日立刻蚀系统改造

综上所述，Hitachi M-05A2LS-400K射频匹配器凭借专用化设计和稳定匹配性能，在半导体刻蚀等工艺设备中承担着关键的射频传输职能。

Hitachi M-05A2LS-400K 射频控制器  英文介绍

Introduction to Hitachi M-05A2LS-400K RF Controller

Hitachi M-05A2LS-400K is an RF matching box component manufactured by Hitachi, used to achieve impedance matching between RF power supply and reaction chamber in semiconductor etching equipment.

Product features (8 items)

Made by Hitachi, specifically designed to support semiconductor etching equipment

RF matching box with automatic impedance matching function

Model designation with RBD3.1 configuration version identification

With CE certification mark, in compliance with safety regulations

Modular design for easy installation, maintenance, and replacement

Automatic matching ensures stable operation of plasma

Industrial grade components, supporting long-term continuous operation

Specially designed for Hitachi semiconductor etching equipment platform

Main application areas (8 items)

Semiconductor etching equipment for shallow trench etching systems

Microwave plasma etching system, compatible with M-511E equipment

Dielectric etching process, matching chamber impedance changes

Silicon via etching ensures stable high aspect ratio processes

Wafer manufacturing production line, as the etching core RF component

Plasma cleaning equipment provides stable RF transmission

Equipment maintenance and replacement, replacement of old matching devices

Equipment renovation and upgrade, accompanied by Hitachi etching system transformation

In summary, the Hitachi M-05A2LS-400K RF tuner plays a crucial role in RF transmission in semiconductor etching and other process equipment due to its specialized design and stable matching performance.

Hitachi M-05A2LS-400K 射频控制器 产品图片

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型号：Hitachi M-05A2LS-400K 射频控制器

质保：一年

成色：全新/二手

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特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

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