VAT 65048-JH52-AQK 闸阀电机 PDF资料
1.产 品 资 料 介 绍：
VAT 65048-JH52-AQK 闸阀电机简介
VAT 65048-JH52-AQK 是 VAT 65048 系列真空阀门的驱动组件，采用步进电机驱动阀板，实现真空压力的精确控制。
产品特点（8条）
VAT 65048 系列阀门组件，带逻辑接口
步进电机驱动，阀板定位精准
编码器实时监测阀板位置
内置压力控制器，自动调节阀板开度
支持外部开关中断电源，进入安全模式
安全模式下阀板停在当前位置
配备4位数字显示，显示阀门状态
支持远程数字和模拟信号控制
主要应用领域（8条）
半导体刻蚀工艺，精确控制反应腔室压力
溅射镀膜设备，维持工艺真空压力稳定
化学气相沉积，控制腔室气体压力环境
极紫外光刻设备，维持超高压真空环境
OLED 面板制造，控制蒸发速率
同步辐射光源，隔离真空束线
科研实验室，各类真空实验压力控制
真空设备维保，替换老旧阀门驱动组件
综上所述，VAT 65048-JH52-AQK 闸阀电机凭借步进电机驱动、编码器反馈和集成压力控制能力，在半导体制造及科研真空工艺中承担着精确的压力调节与阀门动作控制职能
Introduction to VAT 65048-JH52-AQK Gate Valve Motor
VAT 65048-JH52-AQK is the driving component of the VAT 65048 series vacuum valve, which uses a stepper motor to drive the valve plate and achieve precise control of vacuum pressure.
Product features (8 items)
VAT 65048 series valve components with logical interfaces
Stepper motor drive, precise valve plate positioning
Encoder real-time monitoring of valve plate position
Built in pressure controller, automatic adjustment of valve plate opening
Support external switch to interrupt power supply and enter safe mode
The valve plate stops at the current position in safe mode
Equipped with a 4-digit display to show valve status
Support remote digital and analog signal control
Main application areas (8 items)
Semiconductor etching process, precise control of reaction chamber pressure
Sputtering coating equipment to maintain stable process vacuum pressure
Chemical vapor deposition, controlling chamber gas pressure environment
Extreme ultraviolet lithography equipment to maintain ultra-high pressure vacuum environment
OLED panel manufacturing, controlling evaporation rate
Synchrotron radiation source, isolated vacuum beamline
Research laboratory, pressure control for various vacuum experiments
Vacuum equipment maintenance, replacement of old valve drive components
In summary, the VAT 65048-JH52-AQK gate valve motor, with its stepper motor drive, encoder feedback, and integrated pressure control capabilities, plays a precise role in pressure regulation and valve action control in semiconductor manufacturing and research vacuum processes
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| K32HCHJ-LEK-M2-01 | 6SC6101-3A-Z | IMASI23 |
| K32HCHJ-LEK-M2-00 | 02-052474-00 | IMASI13 |
| K31SSFS-LEK-SS-02 |  6SC6901-0VR07 | IPFLD24 |
| K31HRLG-LDK-NS-00 | 6SC6508-4AA02 | IMSED01 |
| K31HRHJ-LNK-NS-00 | 6SC6502-0AF01 | IEPDF02 |
| K31HMHJ-LNK-NS-00 | 6SC6190-0FB61 | IEPAS02 |
| K31HLLG-LNK-NS-01 | PSR45-220 | IMASI02 |
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