Kokusai Electric CX1231 控制器模块 PDF资料 

1.产 品 资 料 介 绍：

Kokusai Electric CX1231 控制器模块简介

Kokusai Electric CX1231 是一款专用于半导体制造设备的控制器模块，常见于 Vertron III DD-803V 型立式扩散炉系统，在晶圆热处理工艺中承担关键的逻辑控制与状态管理功能。

产品特点（8条）

1. 原厂标示为 Rev. 1A 版本，Kokusai 专有控制系统组件

2. 适配 Vertron III DD-803V 立式扩散炉设备平台

3. 半导体前道制程专用控制器，非通用 PLC 模块

4. 执行高温炉管区温度与工艺配方的逻辑管控

5. 协调气体流量控制器与真空系统的开关动作

6. 具备设备状态监控与安全联锁接口功能

7. 符合半导体洁净室环境与 ESD 防护要求

8. 与原设备系统紧密绑定，不可跨平台替代

主要应用领域（8条）

1. 半导体立式扩散炉，用于高温掺杂工艺控制

2. LPCVD 设备，执行多区温控与气体配比逻辑

3. 晶圆氧化工艺，控制升温斜率与气体切换时序

4. 半导体厂炉管区现场控制柜，作为近端控制节点

5. 200mm/300mm 晶圆产线热处理设备维保替换

6. 与 CXP 控制机架及 KOMS 辅助板卡协同工作

7. 设备故障诊断与状态上报，配合 MES 系统监控

8. 热处理设备翻新与备件储备，作为停产型号替换件

综上所述，Kokusai Electric CX1231 控制器模块凭借专用化的工艺适配性和稳定的运行表现，在半导体立式炉管设备中承担着关键的逻辑控制角色，是维持特定产线持续运转的重要保障。

Kokusai Electric CX1231 控制器模块  英文介绍

Introduction to Kokusai Electric CX1231 Controller Module

Kokusai Electric CX1231 is a controller module specifically designed for semiconductor manufacturing equipment, commonly found in the Vertron III DD-803V vertical diffusion furnace system. It plays a critical role in logic control and state management during wafer heat treatment processes.

Product features (8 items)

Original factory marked as Rev. 1A version, Kokusai proprietary control system components

Compatible with Vertron III DD-803V vertical diffusion furnace equipment platform

Semiconductor front-end process dedicated controller, non universal PLC module

Implement logical control of temperature and process formula in the high-temperature furnace tube area

Coordinate the switching actions of gas flow controller and vacuum system

Equipped with equipment status monitoring and safety interlock interface function

Compliant with semiconductor cleanroom environment and ESD protection requirements

Closely bound to the original device system and cannot be replaced across platforms

Main application areas (8 items)

Semiconductor vertical diffusion furnace, used for high-temperature doping process control

LPCVD equipment, executing multi zone temperature control and gas ratio logic

Wafer oxidation process, controlling the heating slope and gas switching timing

On site control cabinet for semiconductor plant furnace tube area, serving as a proximal control node

Maintenance and replacement of heat treatment equipment for 200mm/300mm wafer production line

Collaborate with CXP control rack and KOMS auxiliary board

Equipment fault diagnosis and status reporting, in conjunction with MES system monitoring

Refurbishment of heat treatment equipment and reserve of spare parts as replacement parts for discontinued models

In summary, the Kokusai Electric CX1231 controller module, with its specialized process adaptability and stable operational performance, plays a critical logical control role in semiconductor vertical furnace equipment and is an important guarantee for maintaining the continuous operation of specific production lines.

Kokusai Electric CX1231 控制器模块  产品图片

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型号：Kokusai Electric CX1231 控制器模块

质保：一年

成色：全新/二手

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