Intellisys 27-408884-00 自适应无源控制器 PDF资料
1.产 品 资 料 介 绍：
Intellisys 27-408884-00 自适应无源控制器
产品特点
属于Nor-Cal Intellisys系列自适应压力控制器。
专为半导体及真空工艺环境下的高精度压力控制设计。
采用自适应控制算法，可根据系统变化自动优化调节参数。
控制精度可达±0.2% FS（满量程）。
支持模拟电压、串行数字及DeviceNet等通信接口。
前面板配备控制开关，支持手动开/关测试与操作。
采用铝制外壳设计，安装时需注意防护。
推荐在防静电工作区进行操作和安装。
上电后自动执行约30秒的阀门初始化及校准循环。
适配APC-x00A及APC-x50A系列阀门。
应用领域
半导体制造设备中的真空压力精密控制。
刻蚀、沉积等工艺腔体的压力调节系统。
科研实验室中的高精度真空实验装置。
薄膜沉积设备的气氛压力管理。
需集成至上位机软件的自动化压力控制系统。
存量半导体产线设备的压力控制器维护与替换。
总结
Intellisys 27-408884-00是Nor-Cal专为半导体真空工艺设计的自适应压力控制器，以高精度、自适应算法及多种通信接口为核心特点，主要用于刻蚀、沉积等设备中需要对真空压力进行精密调节的场景。
Intellisys 27-408884-00 自适应无源控制器 英文介绍
Intellisys 27-408884-00 Adaptive Passive Controller
Product Features
Belonging to the Nor Cal Intellisys series of adaptive pressure controllers.
Specially designed for high-precision pressure control in semiconductor and vacuum process environments.
Adopting adaptive control algorithms, parameters can be automatically optimized and adjusted according to system changes.
The control accuracy can reach ± 0.2% FS (full range).
Supports communication interfaces such as analog voltage, serial digital, and DeviceNet.
The front panel is equipped with a control switch that supports manual on/off testing and operation.
Adopting an aluminum shell design, attention should be paid to protection during installation.
It is recommended to operate and install in an anti-static work area.
Automatically execute a 30 second valve initialization and calibration cycle after power on.
Compatible with APC-x00A and APC-x50A series valves.
Application Domain
Precision control of vacuum pressure in semiconductor manufacturing equipment.
Pressure regulation system for etching, deposition and other process chambers.
High precision vacuum experimental equipment in scientific research laboratories.
Atmosphere pressure management of thin film deposition equipment.
An automated pressure control system that needs to be integrated into the upper computer software.
Maintenance and replacement of pressure controllers for existing semiconductor production line equipment.
summary
Intellisys 27-408884-00 is an adaptive pressure controller designed by Nor Cal specifically for semiconductor vacuum processes. It features high precision, adaptive algorithms, and multiple communication interfaces, and is mainly used in scenarios where precision adjustment of vacuum pressure is required in etching, deposition, and other equipment.
Intellisys 27-408884-00 自适应无源控制器 产品图片
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