AE 3155162-037射频匹配模块 PDF资料
这个 AE 3155162-037 是 Advanced Energy（AE）的 Navigator 10013 系列射频匹配模块，10kW 功率等级，13.56MHz 标准工业频率，配套 Novellus（现属 Lam Research）的半导体设备使用。下面简单说说。
产品特点
AE 原厂出品，属于 Navigator 10013 系列射频匹配网络，10kW 功率等级。
配套 Novellus 机台使用，Novellus 那边的零件号是 27-368450-00。
工作频率 13.56MHz，属于半导体工业标准射频频率，跟射频发生器配套工作。
支持自动阻抗匹配和闭环控制，带 CEX In/Out 通信接口。
水冷散热设计，尺寸约 134×216×381mm，适合集成到半导体机台里。
产品参数
品牌：Advanced Energy，简称 AE。
型号：Navigator 10013。
零件号：3155162-037，对应 Novellus 27-368450-00。
功率：10kW 等级。
频率：13.56MHz。
冷却方式：水冷。
产品应用领域
半导体制造设备，Novellus/Lam 机台上做射频阻抗匹配。
等离子体刻蚀工艺，配合射频发生器给腔体供能。
薄膜沉积设备，CVD/PVD 工艺的射频匹配网络。
腔体清洗和去胶，利用等离子体做腔体清洁。
设备维修替换，匹配模块坏了拿来换。
总的来说，AE 3155162-037 就是 Navigator 10013 系列射频匹配模块，10kW、13.56MHz，配套 Novellus 机台使用，半导体设备上做射频阻抗自动匹配用的。
AE 3155162-037射频匹配模块 英文介绍
This AE 3155162-037 is a Navigator 10013 series RF matching module from Advanced Energy (AE), with a power level of 10kW and a standard industrial frequency of 13.56MHz, used in conjunction with semiconductor equipment from Novellus (now part of Lam Research). Below is a brief explanation.
Product Features
Produced by AE factory, belonging to Navigator 10013 series RF matching network, with a power level of 10kW.
For use with the Novellus machine, the part number on the Novellus side is 27-368450-00.
The working frequency is 13.56MHz, which belongs to the semiconductor industry standard RF frequency and works in conjunction with RF generators.
Supports automatic impedance matching and closed-loop control, with CEX In/Out communication interface.
Water cooling and heat dissipation design, with dimensions of approximately 134 × 216 × 381mm, suitable for integration into semiconductor machines.
Product Specifications
Brand: Advanced Energy, abbreviated as AE.
Model: Navigator 10013.
Part number: 3155162-037, corresponding to Novellus 27-368450-00.
Power: 10kW level.
Frequency: 13.56MHz.
Cooling method: Water cooling.
Product application areas
Perform RF impedance matching on semiconductor manufacturing equipment and Novellus/Lam machines.
Plasma etching process, combined with RF generator to supply energy to the cavity.
Thin film deposition equipment, RF matching network for CVD/PVD process.
Cleaning and removing glue from the cavity, using plasma for cavity cleaning.
Equipment maintenance and replacement. If the matching module is broken, please replace it.
In general, AE 3155162-037 is the Navigator 10013 series RF matching module, 10kW, 13.56MHz, used in conjunction with Novellus machines for automatic RF impedance matching on semiconductor equipment.
AE 3155162-037射频匹配模块 产品图片
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