AE 3Z80-000653-V2射频匹配器 PDF资料
这个 AE 3Z80-000653-V2 是 Advanced Energy(AE)的 Navigator II 系列射频匹配器,配套东京电子(TEL)的半导体设备使用。下面简单说说。
产品特点
AE 原厂出品,属于 Navigator II 系列射频匹配器。
配套 TEL 东京电子的机台使用,TEL 零件号就是 3Z80-000653-V2。
AE 那边的型号是 RF Navigator II,零件号 3155301-014。
属于射频传输链上的自动阻抗匹配单元,跟射频发生器配套工作。
在中国制造,带 CE 认证。
产品参数
品牌:Advanced Energy,简称 AE。
型号:RF Navigator II。
AE 零件号:3155301-014。
TEL 零件号:3Z80-000653-V2。
产地:中国制造。
产品应用领域
半导体制造设备,TEL 机台上做射频阻抗匹配。
等离子体处理系统,配合射频发生器给腔体供能。
刻蚀和沉积工艺,保证射频功率高效传输。
设备维修替换,匹配器坏了拿来换。
半导体设备维护,属于常见备件类型。
总的来说,AE 3Z80-000653-V2 就是 Navigator II 射频匹配器,配套 TEL 机台使用,半导体设备上做射频阻抗自动匹配用的。
This AE 3Z80-000653-V2 is a Navigator II series RF matching device from Advanced Energy (AE), used in conjunction with semiconductor equipment from Tokyo Electronics (TEL). Below is a brief explanation.
Product Features
Produced by AE factory, it belongs to the Navigator II series RF matching device.
The machine is used in conjunction with TEL Tokyo Electronics, and the TEL part number is 3Z80-000653-V2.
The model on the AE side is RF Navigator II, part number 3155301-014.
It belongs to the automatic impedance matching unit on the RF transmission chain and works in conjunction with the RF generator.
Made in China with CE certification.
Product Specifications
Brand: Advanced Energy, abbreviated as AE.
Model: RF Navigator II.
AE part number: 3155301-014.
TEL part number: 3Z80-000653-V2.
Origin: Made in China.
Product application areas
Perform RF impedance matching on semiconductor manufacturing equipment and TEL machines.
Plasma processing system, combined with RF generator to supply energy to the cavity.
Etching and deposition processes ensure efficient transmission of RF power.
Equipment maintenance and replacement. If the matching device is broken, please replace it.
Semiconductor equipment maintenance is a common type of spare parts.
Overall, AE 3Z80-000653-V2 is the Navigator II RF Matcher, used in conjunction with TEL machines for automatic RF impedance matching on semiconductor equipment.

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