Edwards A409-14-977真空干式泵 PDF资料
这个 Edwards A409-14-977 是爱德华（Edwards）家的干式真空泵，属于半导体设备上用的无油真空泵。下面简单说说。
产品特点
爱德华原厂出品，属于干式真空泵，泵腔内不用油，不会返油污染工艺腔体。
采用干式运行结构，适合半导体制造这种对洁净度要求高的场合。
跟爱德华的半导体设备配套使用，属于机台上的标准真空组件。
无油设计维护量比油泵小，不用频繁换油和处理废油。
归类为半导体设备真空系统里的干泵单元。
产品参数
品牌：Edwards，爱德华。
型号：A409-14-977。
类型：干式真空泵。
适用场景：半导体设备真空系统。
运行方式：无油干式运行。
产品应用领域
半导体制造设备，给工艺腔体做粗真空和抽气。
薄膜沉积设备，配合分子泵做前级抽真空。
刻蚀设备，维持腔体真空环境。
设备维修替换，干泵坏了拿来换。
半导体设备维护，属于常见备件类型。
总的来说，Edwards A409-14-977 就是爱德华的干式真空泵，半导体设备上做无油抽真空用的
This Edwards A409-14-977 is a dry vacuum pump from the Edwards family, which is an oil-free vacuum pump used in semiconductor equipment. Below is a brief explanation.
Product Features
Produced by Edward's original factory, it belongs to the dry vacuum pump. There is no oil in the pump chamber, and there will be no oil return to pollute the process chamber.
Adopting a dry operation structure, it is suitable for semiconductor manufacturing, which requires high cleanliness.
Used in conjunction with Edward's semiconductor equipment, it is a standard vacuum component on the machine.
Oil free design requires less maintenance than oil pumps, eliminating the need for frequent oil changes and waste oil disposal.
Classified as a dry pump unit in semiconductor equipment vacuum systems.
Product Specifications
Brand: Edwards, Edwards.
Model: A409-14-977.
Type: Dry vacuum pump.
Applicable scenarios: Vacuum systems for semiconductor equipment.
Operation mode: oil-free dry operation.
Product application areas
Semiconductor manufacturing equipment, providing rough vacuum and pumping for process chambers.
Thin film deposition equipment, combined with molecular pumps for pre vacuum pumping.
Etching equipment to maintain a vacuum environment in the chamber.
Equipment maintenance and replacement, replace the broken dry pump.
Semiconductor equipment maintenance is a common type of spare parts.
In general, Edwards A409-14-977 is Edwards' dry vacuum pump, used for oil-free vacuum pumping on semiconductor equipment
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