Nihon Koshuha 3Z80-000869-V3电源模块 PDF资料
这个 Nihon Koshuha 3Z80-000869-V3 是日本高周波(Nihon Koshuha)家的微波电源模块,日本制造,配套东京电子(TEL)的半导体设备使用。下面简单说说。
产品特点
日本高周波原厂出品,日本制造,属于微波电源类组件。
TEL 零件号 3Z80-000869-V3,跟东京电子的机台配套使用。
日本高周波是 1932 年成立的老牌电磁波技术厂商,专门做半导体制造用的高频电源和微波应用设备。
微波电源设计用于等离子体工艺,频率稳定,跟磁控管型比频率可控性更好。
模块化结构,属于半导体设备射频微波传输链上的标准组件。
产品参数
品牌:Nihon Koshuha,日本高周波。
型号:3Z80-000869-V3。
产地:日本制造。
配套设备:TEL 东京电子半导体机台。
类型:微波电源模块。
产品应用领域
半导体制造设备,TEL 机台上的微波电源供应。
等离子体工艺,给腔体提供微波能量激发等离子体。
刻蚀和 CVD 沉积设备,微波等离子体源配套。
设备维修替换,微波电源模块坏了拿来换。
半导体设备维护,属于常见备件类型。
总的来说,Nihon Koshuha 3Z80-000869-V3 就是日本高周波给 TEL 半导体设备配套的微波电源模块,日本原产,等离子体工艺环节里做微波能量供应用的。
Nihon Koshuha 3Z80-000869-V3电源模块 英文介绍
This Nihon Koshuha 3Z80-000869-V3 is a microwave power module from Nihon Koshuha in Japan, manufactured in Japan and used in conjunction with semiconductor equipment from Tokyo Electronics (TEL). Below is a brief explanation.
Product Features
Produced by the original factory in Japan, manufactured in Japan, it belongs to the category of microwave power components.
TEL part number 3Z80-000869-V3, used in conjunction with machines from Tokyo Electronics.
Nippon High Frequency is a well-established electromagnetic wave technology manufacturer established in 1932, specializing in high-frequency power supplies and microwave application equipment for semiconductor manufacturing.
Microwave power supply is designed for plasma technology, with stable frequency and better frequency controllability compared to magnetron type.
Modular structure, belonging to the standard components on the RF microwave transmission chain of semiconductor equipment.
Product Specifications
Brand: Nihon Koshuha, Japanese high-frequency.
Model: 3Z80-000869-V3.
Origin: Made in Japan.
Supporting equipment: TEL Tokyo Electronic Semiconductor Machine.
Type: Microwave power module.
Product application areas
Microwave power supply on semiconductor manufacturing equipment and TEL machines.
Plasma technology provides microwave energy to excite plasma in the cavity.
Etching and CVD deposition equipment, matched with microwave plasma source.
Equipment repair and replacement, microwave power module is broken and needs to be replaced.
Semiconductor equipment maintenance is a common type of spare parts.
Overall, Nihon Koshuha 3Z80-000869-V3 is a microwave power module provided by Japan High Frequency to TEL semiconductor equipment. It is of Japanese origin and is used for supplying microwave energy in the plasma process.
Nihon Koshuha 3Z80-000869-V3电源模块 产品图片

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