Yaskawa YSC-02D04B02主轴电机 PDF资料
这个 Yaskawa YSC-02D04B02 是安川电机(Yaskawa)给 Novellus(现在归 Lam Research)半导体设备配套的主轴电机。下面简单说说。
产品特点
安川原厂出品,属于半导体设备上用的精密主轴电机。
配套 Novellus 机台使用,Novellus 那边的零件号是 61-30647478-00。
归类为工业控制模块类组件,属于设备里的精密驱动单元。
工作电压 24V DC 等级,跟半导体设备的供电体系匹配。
模块化设计,跟 Novellus 机台配套使用。
产品参数
品牌:Yaskawa,安川电机。
型号:YSC-02D04B02。
Novellus 零件号:61-30647478-00。
工作电压:24V DC。
类型:主轴电机,半导体设备用驱动组件。
产品应用领域
半导体制造设备,Novellus 机台上的主轴驱动。
晶圆传输系统,配合机械手做精密运动控制。
精密加工设备,需要高精度主轴驱动的场合。
设备维修替换,主轴电机坏了拿来换。
半导体设备维护,属于常见备件类型。
总的来说,Yaskawa YSC-02D04B02 就是安川给 Novellus 半导体设备配套的主轴电机,24V DC 驱动,晶圆传输和精密加工环节里做精密运动控制用的。
This Yaskawa YSC-02D04B02 is a spindle motor provided by Yaskawa Electric to Novellus (now under Lam Research) semiconductor equipment. Below is a brief explanation.
Product Features
Produced by Yaskawa Original Factory, it belongs to precision spindle motors used in semiconductor equipment.
For use with the Novellus machine, the part number on the Novellus side is 61-30647478-00.
Classified as an industrial control module component, it belongs to the precision drive unit in equipment.
The working voltage is 24V DC level, which matches the power supply system of semiconductor equipment.
Modular design, compatible with Novellus machines.
Product Specifications
Brand: Yaskawa, Yaskawa Electric.
Model: YSC-02D04B02.
Novellus part number: 61-30647478-00.
Working voltage: 24V DC.
Type: Spindle motor, driving component for semiconductor equipment.
Product application areas
Semiconductor manufacturing equipment, spindle drive on Novellus machines.
Wafer transfer system, coupled with robotic arms for precise motion control.
Precision machining equipment requires high-precision spindle drive.
Equipment maintenance and replacement, the spindle motor is broken and needs to be replaced.
Semiconductor equipment maintenance is a common type of spare parts.
Overall, Yaskawa YSC-02D04B02 is a spindle motor provided by Yaskawa to Novellus semiconductor equipment, driven by 24V DC, used for precision motion control in wafer transfer and precision machining processes.

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