Comdel FP2849-04R1射频匹配网络模块 PDF资料
这个 Comdel FP2849-04R1 是 Comdel 家的 CPMX-6000 MatchPro 射频匹配网络模块,美国制造,应用材料(AMAT)的零件号是 0190-84060。下面简单说说。
产品特点
Comdel 原厂出品,属于 CPMX-6000 MatchPro 系列,是射频匹配网络模块。
美国制造,AMAT 零件号 0190-84060,跟应用材料的机台配套使用。
MatchPro 系列的设计目标就是自动匹配射频负载阻抗,让射频发生器输出的能量高效送到腔体里。
模块化结构,内部有可调电容和传感器,能实时监测反射功率并自动调谐。
属于半导体设备射频传输链上的标准组件,跟射频发生器配套工作。
产品参数
品牌:Comdel。
型号:CPMX-6000,零件号 FP2849-04R1。
AMAT 零件号:0190-84060。
产地:美国制造。
类型:射频匹配网络模块。
产品应用领域
半导体制造设备,AMAT 机台上做射频阻抗匹配。
等离子体处理系统,配合射频发生器给腔体供能。
蚀刻和沉积工艺,保证射频功率高效传输。
真空镀膜设备,射频溅射的匹配网络。
设备维修替换,匹配网络模块坏了拿来换。
总的来说,Comdel FP2849-04R1 就是 CPMX-6000 MatchPro 射频匹配网络模块,美国原产,半导体设备上做射频阻抗自动匹配用的。
Comdel FP2849-04R1射频匹配网络模块 英文介绍
This Comdel FP2849-04R1 is Comdel's CPMX-6000 MatchPro RF matching network module, manufactured in the United States, with part number 0190-84060 for Applied Materials (AMAT). Below is a brief explanation.
Product Features
Produced by Comdel, it belongs to the CPMX-6000 MatchPro series and is an RF matching network module.
Made in the United States, AMAT part number 0190-84060, used in conjunction with the application material machine.
The design goal of the MatchPro series is to automatically match the impedance of the RF load, allowing the energy output from the RF generator to be efficiently delivered to the cavity.
Modular structure with adjustable capacitors and sensors inside, capable of real-time monitoring of reflected power and automatic tuning.
It is a standard component on the RF transmission chain of semiconductor equipment and works in conjunction with RF generators.
Product Specifications
Brand: Comdel.
Model: CPMX-6000, part number FP2849-04R1.
AMAT part number: 0190-84060.
Origin: Made in the United States.
Type: RF matching network module.
Product application areas
Perform RF impedance matching on semiconductor manufacturing equipment and AMAT machines.
Plasma processing system, combined with RF generator to supply energy to the cavity.
Etching and deposition processes ensure efficient transmission of RF power.
Vacuum coating equipment, matching network for RF sputtering.
Equipment repair and replacement, replace if the matching network module is broken.
Overall, Comdel FP2849-04R1 is the CPMX-6000 MatchPro RF matching network module, originating from the United States and used for automatic RF impedance matching on semiconductor equipment.
Comdel FP2849-04R1射频匹配网络模块 产品图片

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