Inficon 923-713-G1气体分析仪 PDF资料
这个 Inficon 923-713-G1 是 Inficon 家的 HPR-1100 Transpector HPR 气体分析仪,属于残余气体分析仪(RGA)那一类。下面简单说说。
产品特点
Inficon 原厂出品,属于 HPR-1100 Transpector HPR 系列,带 CE 认证。
是 Transpector 系列残余气体分析仪,用来监测真空腔体里的气体成分。
标准配置包含 H100M 等组件,跟 HPR-1100 主机配套使用。
属于高压力版(HPR)型号,能在较高压力下工作,适合半导体工艺环境。
归类为气体分析仪,是半导体设备上做真空工艺监测的常用工具。
产品参数
品牌:Inficon。
型号:HPR-1100 Transpector HPR。
零件号:923-713-G1。
类型:残余气体分析仪(RGA)。
配置组件:含 H100M 等模块。
产品应用领域
半导体制造设备,监测蚀刻、沉积腔体的残余气体。
真空镀膜和溅射系统,实时分析腔体气氛。
科研真空装置,做气体成分检测和泄漏排查。
工业真空炉,监控工艺过程中的气体变化。
设备维修替换,分析仪坏了拿来换。
总的来说,Inficon 923-713-G1 就是 HPR-1100 Transpector HPR 气体分析仪,属于残余气体分析仪,半导体和真空设备上用来监测气体成分的。
This Inficon 923-713-G1 is Inficon's HPR-1100 Transspector HPR gas analyzer, which belongs to the category of Residual Gas Analyzer (RGA). Below is a brief explanation.
Product Features
Inficon is an original product of the HPR-1100 Transspector HPR series, with CE certification.
It is a residual gas analyzer from the Transpector series, used to monitor the gas composition in vacuum chambers.
The standard configuration includes components such as H100M, which are used in conjunction with the HPR-1100 host.
Belonging to the high-pressure version (HPR) model, it can work under higher pressure and is suitable for semiconductor process environments.
Classified as a gas analyzer, it is a commonly used tool for vacuum process monitoring on semiconductor equipment.
Product Specifications
Brand: Inficon.
Model: HPR-1100 Translator HPR.
Part number: 923-713-G1.
Type: Residual Gas Analyzer (RGA).
Configuration components: including modules such as H100M.
Product application areas
Semiconductor manufacturing equipment, monitoring residual gases in etching and deposition chambers.
Vacuum coating and sputtering system, real-time analysis of chamber atmosphere.
Research vacuum equipment, perform gas composition detection and leak investigation.
Industrial vacuum furnace, monitoring gas changes during the process.
Equipment maintenance and replacement. If the analyzer is broken, please replace it.
In general, Inficon 923-713-G1 is an HPR-1100 Transspector HPR gas analyzer, which is a residual gas analyzer used in semiconductor and vacuum equipment to monitor gas composition.

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