ENI DCG-200EH-S0J直流等离子体发生器 PDF资料
这个 ENI DCG-200EH-S0J 是 ENI 家的 DCG-200E Optima 系列直流等离子体发生器，属于从属模块。下面简单说说。
产品特点
ENI 原厂出品，属于 DCG-200E Optima 系列，是 Slave 从属模块，配合主电源一起工作。
输入是三相 380 到 780VAC，输出功率 20kW 等级，带 CE 认证。
归类为直流等离子体发生器，给工艺腔体提供直流等离子体能量。
模块化设计，跟 ENI 主电源配套使用，插上就能通信。
常见于设备维护流通市场，是半导体设备上的配套电源模块。
产品参数
品牌：ENI。
型号：DCG-200EH-S0J，属于 DCG-200E Optima 系列。
类型：直流等离子体发生器，Slave 从属模块。
输入：三相 380 到 780VAC，50/60Hz。
输出功率：20kW 等级。
产品应用领域
半导体制造设备，给工艺腔体提供直流等离子体电源。
等离子体处理系统，激发和维持等离子体。
溅射和镀膜设备，配合主电源做功率输出。
工业镀膜产线，真空腔体的等离子体电源。
设备维修替换，从属电源模块坏了拿来换。
总的来说，ENI DCG-200EH-S0J 就是 ENI DCG-200E Optima 系列的从属直流等离子体发生器，20kW 等级，半导体和工业镀膜设备上用的 Slave 电源模块。
ENI DCG-200EH-S0J直流等离子体发生器 英文介绍
This ENI DCG-200EH-S0J is a subsidiary module of ENI's DCG-200E Optima series DC plasma generator. Below is a brief explanation.
Product Features
Produced by ENI, belonging to the DCG-200E Optima series, it is a slave slave module that works together with the main power supply.
The input is three-phase 380 to 780VAC, with an output power of 20kW level and CE certification.
Classified as a DC plasma generator, it provides DC plasma energy to the process chamber.
Modular design, compatible with ENI main power supply, can be plugged in for communication.
Commonly seen in the equipment maintenance and circulation market, it is a supporting power module on semiconductor equipment.
Product Specifications
Brand: ENI.
Model: DCG-200EH-S0J, belonging to the DCG-200E Optima series.
Type: DC plasma generator, Slave slave module.
Input: Three phase 380 to 780VAC, 50/60Hz.
Output power: 20kW level.
Product application areas
Semiconductor manufacturing equipment provides DC plasma power to process chambers.
Plasma processing system, which excites and maintains plasma.
Sputtering and coating equipment, coupled with the main power supply for power output.
Industrial coating production line, plasma power supply for vacuum chamber.
Equipment maintenance and replacement, replace the faulty subordinate power module.
In general, ENI DCG-200EH-S0J is a slave power module used in semiconductor and industrial coating equipment, belonging to the ENI DCG-200E Optima series of DC plasma generators with a power rating of 20kW.
ENI DCG-200EH-S0J直流等离子体发生器 产品图片
3.其他产品
Honeywell CFHD-SBHM控制器模块
PPD113B03R2060 3BHE023584R2060过程控制模块
A-B T8111C处理器
4.其他产品
CI854 3BSE025347R1 Output electronic module
CS512 3BUR980009R1 Thermocouple module
CS513K02 3BSE004773R1 Thermocouple card
| 369-Hi-R-M-0-0-H-0 | 531X306LCCBDM2 | IC3603A279A |
| 369-HI-R-M-0-0-0-E | 531X306LCCBBM1 | IC3603A278F |
| 369-HI-R-M-0-0-0 | 531X306LCCBAM1 | IC3603A278B |
| 369-HI-R-M-0-0 | 531X306LCCAEM1 | IC3603A277A |
| 369-HI-R-B-0-E-0-E | 531X306LCCADM1 | IC3603A200C |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
