STP SCU-A2503PV分子泵控制器 PDF资料
这个 STP SCU-A2503PV 是爱德华（Edwards）给 STP-A2503 磁悬浮分子泵配套的专用控制器。下面简单说说。
产品特点
爱德华原厂配套，专门驱动 STP-A2503PV 耐腐蚀磁悬浮分子泵。
全数字闭环调速，转速波动小，抽气效率稳定。
内置 TMS 温度管理，自动调节泵体加热和冷却阀门。
实时监测转子振动和轴承状态，自动减振并提前预警轴承损耗。
金属屏蔽外壳，抗半导体腔体射频干扰，适合腐蚀性气体工艺环境。
产品参数
品牌：Edwards，爱德华。
型号：SCU-A2503PV。
输入电压：200 到 240V，50/60Hz。
配套泵型：STP-A2503PV 磁悬浮分子泵。
类型：全数字分子泵控制器，带 TMS 温控接口。
产品应用领域
半导体刻蚀设备，给腐蚀工艺腔体提供真空控制。
薄膜沉积设备，配合分子泵维持腔体真空。
科研仪器，电子显微镜、表面分析仪这类需要高真空的设备。
离子注入机，真空系统配套控制。
设备维修替换，分子泵控制器坏了拿来换。
总的来说，STP SCU-A2503PV 就是爱德华 STP-A2503PV 磁悬浮分子泵的专用控制器，半导体刻蚀和薄膜沉积设备上用的真空控制单元。
This STP SCU-A2503PV is a dedicated controller provided by Edwards for the STP-A2503 magnetic levitation molecular pump. Below is a brief explanation.
Product Features
Edwards original factory matching, specifically designed to drive STP-A2503PV corrosion-resistant magnetic levitation molecular pump.
Fully digital closed-loop speed regulation, with minimal speed fluctuations and stable pumping efficiency.
Built in TMS temperature management, automatic adjustment of pump body heating and cooling valves.
Real time monitoring of rotor vibration and bearing status, automatic vibration reduction, and early warning of bearing losses.
Metal shielding shell, resistant to semiconductor cavity RF interference, suitable for corrosive gas process environments.
Product Specifications
Brand: Edwards, Edwards.
Model: SCU-A2503PV.
Input voltage: 200 to 240V, 50/60Hz.
Supporting pump type: STP-A2503PV magnetic levitation molecular pump.
Type: Fully digital molecular pump controller with TMS temperature control interface.
Product application areas
Semiconductor etching equipment provides vacuum control for the etching process chamber.
Thin film deposition equipment, combined with molecular pumps to maintain chamber vacuum.
Research instruments such as electron microscopes and surface analyzers require high vacuum.
Ion implantation machine, vacuum system matching control.
Equipment maintenance and replacement, molecular pump controller is broken and needs to be replaced.
In general, STP SCU-A2503PV is a dedicated controller for the Edward STP-A2503PV magnetic levitation molecular pump and a vacuum control unit used in semiconductor etching and thin film deposition equipment.
3.其他产品
Woodward PEAK200-HVAC 8200-1501涡轮控制模块
Honeywell CFHD-SBHM控制器模块
PPD113B03R2060 3BHE023584R2060过程控制模块
4.其他产品
CI820 3BSE013200R1 Analog quantity card
CI840 3BSE022457R1 Input electronic module
CI854 3BSE025347R1 Output electronic module
| 3BSE003911R0001 PFRA101 | 531X302DCIAAG5 | IC3603A300A |
| 3BSE003911R0001 | 531X301DCCCAM1 | IC3603A291A |
| 369-LO-R-M-0-D-0-E | 531X301DCCBAG1 | IC3603A290A |
| 369-LO-0-M-F-E-0 | 531X301DCCAXM1 | IC3603A285A |
| 369-HI-R-M-F-P-H-E | 531X301DCCAWM1 | IC3603A282A |
| 369-HI-R-M-F-0-H-E | 531X301DCCATM1 | IC3603A281A |
| 369-HI-R-M-0-0-H-E | 531X301DCCASM1 | IC3603A280A |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
