VAT 64250-UE52-AAT1电动执行器 PDF资料
这个 VAT 64250-UE52-AAT1 是瑞士 VAT 家的电动执行器，装在 64.2 系列高真空控制闸阀上，负责驱动阀板调压力。下面简单说说。
产品特点
瑞士原产，VAT 原厂配套的电动执行机构。
步进电机加内置压力控制器，能自动调节阀板开度。
带 VATLOCK 滚珠锁紧，断电也能关紧，阀板悬浮运动产尘少。
编码器实时监测位置，响应快，控制重复性好。
控制器和阀体可分开装，空间紧张时灵活布置。
产品参数
品牌：VAT，瑞士制造。
型号：64250-UE52-AAT1，属 64.2 系列。
驱动：集成步进电机，带压力控制器，24VDC 供电。
密封：VATLOCK 滚珠锁紧，标准 FKM 密封。
寿命：节流控制约 100 万次，全开全关约 20 万次。
产品应用领域
半导体刻蚀设备，做闭环压力调节。
溅射和 CVD 腔体，稳定镀膜压力。
负载锁腔压力过渡调节。
平板显示和光伏产线，高循环真空压力管控。
科研真空装置，频繁调压隔离的场合。
总的来说，VAT 64250-UE52-AAT1 就是 64.2 系列高真空闸阀的电动执行器，步进电机加压力控制器，半导体刻蚀、溅射这类工艺里做精准压力调节用的。
This VAT 64250-UE52-AAT1 is an electric actuator from VAT Switzerland, installed on the 64.2 series high vacuum control gate valve, responsible for driving the valve plate to regulate pressure. Below is a brief explanation.
Product Features
Swiss origin, VAT original factory matching electric actuator.
The stepper motor with built-in pressure controller can automatically adjust the valve plate opening.
Equipped with VATLOCK ball lock, it can be securely closed even in the event of a power outage, resulting in minimal dust production during valve plate suspension motion.
The encoder monitors the position in real-time, responds quickly, and has good control repeatability.
The controller and valve body can be installed separately, allowing for flexible arrangement when space is limited.
Product Specifications
Brand: VAT, Swiss made.
Model: 64250-UE52-AAT1, belonging to the 64.2 series.
Drive: Integrated stepper motor with pressure controller, powered by 24VDC.
Sealing: VATLOCK ball lock, standard FKM seal.
Lifespan: Throttle control for about 1 million times, fully open and fully close for about 200000 times.
Product application areas
Semiconductor etching equipment for closed-loop pressure regulation.
Sputtering and CVD chambers stabilize coating pressure.
Transitional adjustment of load lock chamber pressure.
Flat panel display and photovoltaic production line, high cycle vacuum pressure control.
Research vacuum equipment, frequent pressure regulation and isolation occasions.
In general, VAT 64250-UE52-AAT1 is an electric actuator for the 64.2 series high vacuum gate valve, a stepper motor and pressure controller, and is used for precise pressure regulation in processes such as semiconductor etching and sputtering.
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