AMAT 0190-54072射频发生器 PDF资料
这个 AMAT 0190-54072 射频发生器,实际上是 Daihen 的 YGA-36B 型号,AMAT 只是贴的自家零件号。下面简单说说它的特点、参数和应用。
产品特点
Daihen 原厂制造,日本产,AMAT 只是采购后贴了自己的零件号 0190-54072。
属于 YGA-36B 系列射频发生器,是半导体设备上用的标准射频电源。
模块化设计,里面有处理器板、电源板、电容板等可单独更换的组件。
跟 AMAT 机台配套使用,兼容性好,插上就能通信。
这个型号在设备维护中用量不小,属于常见备件。
产品参数
品牌:Daihen,AMAT 贴牌。
型号:YGA-36B。
AMAT 零件号:0190-54072。
产地:日本制造。
类型:射频发生器,半导体设备用电源。
产品应用领域
半导体制造设备,AMAT 自己的机台上做射频电源用。
等离子体处理,给腔体提供射频能量激发等离子体。
蚀刻和沉积工艺,配合匹配网络工作。
设备维修替换,机台上的射频发生器坏了拿来换。
设备翻新和流通,很多设备商在买卖这个型号。
总的来说,AMAT 0190-54072 就是 Daihen YGA-36B 射频发生器,日本原产,半导体设备上用的射频电源。
AMAT 0190-54072射频发生器 英文介绍
This AMAT 0190-54072 RF generator is actually Daihen's YGA-36B model, and AMAT only labels its own part number. Below is a brief description of its characteristics, parameters, and applications.
Product Features
Daihen is manufactured by the original factory in Japan, and AMAT only affixed its own part number 0190-54072 after purchasing.
It belongs to the YGA-36B series RF generator and is a standard RF power supply used in semiconductor equipment.
Modular design, which includes individual replaceable components such as processor board, power board, capacitor board, etc.
Used in conjunction with AMAT machines, it has good compatibility and can be plugged in for communication.
This model has a significant usage in equipment maintenance and is a common spare part.
Product Specifications
Brand: Daihen, AMAT OEM.
Model: YGA-36B.
AMAT part number: 0190-54072.
Origin: Made in Japan.
Type: RF generator, power supply for semiconductor equipment.
Product application areas
Semiconductor manufacturing equipment, used for RF power supply on AMAT's own machines.
Plasma treatment provides RF energy to excite plasma in the cavity.
Etching and deposition processes work in conjunction with matching networks.
Equipment maintenance and replacement, the RF generator on the machine is broken and needs to be replaced.
Equipment refurbishment and circulation, many equipment vendors are buying and selling this model.
Overall, AMAT 0190-54072 is the Daihen YGA-36B RF generator, originally from Japan, used as an RF power supply for semiconductor equipment.
AMAT 0190-54072射频发生器 产品图片

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