Edwards B753-01-000涡轮分子真空泵 PDF资料

1.产 品 资 料 介 绍：

这个 Edwards B753-01-000 是 EXT 255H 涡轮分子泵，英国爱德华兹出的复合式真空泵，抽速 255 升每秒，用在需要超高真空的场合。下面简单说说它的特点、参数和应用。

产品特点

1. 复合式设计，涡轮分子泵和拖曳泵做在同一根轴上，高压段也能干活。

2. 转速能到 60000 转每分钟，叶片线速度接近气体热运动速度，抽气效率高。

3. 轴承一边是磁悬浮，一边是陶瓷滚珠，振动小噪音低，适合对稳定性要求高的设备。

4. 铝制转子一体加工成型，动平衡好，能长时间高速运转。

5. 带吹扫口和排气口，可以通惰性气体保护轴承，防止氧气腐蚀润滑油。

产品参数

1. 品牌：Edwards，也叫 BOC Edwards。

2. 型号：EXT 255H。

3. 零件号：B753-01-000。

4. 抽速：255 升每秒。

5. 接口：进气口 ISO 100K，出气口 NW25。

产品应用领域

1. 半导体制造设备，比如蚀刻、PECVD 这类需要高真空的机台。

2. 科研仪器，像质谱仪、表面分析设备，给它们提供超高真空环境。

3. 镀膜和溅射系统，真空腔体抽气用。

4. 光伏和太阳能电池生产线，工艺腔体的真空维持。

5. 医疗设备，一些需要真空环境的医疗仪器也用这个系列。

总的来说，Edwards B753-01-000 就是 EXT 255H 涡轮分子泵，255 升每秒抽速，磁悬浮加陶瓷轴承，半导体和科研设备上用的高真空泵

Edwards B753-01-000涡轮分子真空泵   英文介绍

This Edwards B753-01-000 is an EXT 255H turbo molecular pump, a composite vacuum pump developed by Edwards in the UK, with a pumping speed of 255 liters per second, used in applications that require ultra-high vacuum. Below is a brief description of its characteristics, parameters, and applications.

Product Features

Composite design, turbo molecular pump and drag pump are built on the same shaft, and the high-pressure section can also work.

The rotational speed can reach 60000 revolutions per minute, and the blade linear velocity is close to the gas thermal motion velocity, resulting in high pumping efficiency.

The bearing has magnetic levitation on one side and ceramic ball bearings on the other, with low vibration and noise, suitable for equipment with high stability requirements.

Aluminum rotor is integrally processed and formed, with good dynamic balance and the ability to operate at high speed for a long time.

Equipped with a blowing port and exhaust port, it can protect the bearing with inert gas to prevent oxygen from corroding the lubricating oil.

Product Specifications

Brand: Edwards, also known as BOC Edwards.

Model: EXT 255H.

Part number: B753-01-000.

Extraction speed: 255 liters per second.

Interface: Inlet ISO 100K, outlet NW25.

Product application areas

Semiconductor manufacturing equipment, such as etching, PECVD, and other machines that require high vacuum.

Scientific research instruments, such as mass spectrometers and surface analysis equipment, are provided with ultra-high vacuum environments.

Coating and sputtering systems, used for vacuum chamber pumping.

Vacuum maintenance of process chambers in photovoltaic and solar cell production lines.

Medical equipment, including some medical instruments that require a vacuum environment, also use this series.

In general, Edwards B753-01-000 is an EXT 255H turbo molecular pump with a pumping speed of 255 liters per second. It is a high vacuum pump used in magnetic levitation and ceramic bearings, semiconductors, and research equipment

Edwards B753-01-000涡轮分子真空泵 产品图片

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型号：Edwards B753-01-000涡轮分子真空泵

质保：一年

成色：全新/二手

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