Edwards SCU-A1603C涡轮分子泵控制单元 PDF资料
Edwards SCU-A1603C 是爱德华 STP 系列磁悬浮涡轮分子泵的专用控制单元,主要用来驱动 STP-A1603C 这类泵并管理其运行状态。
产品特点
爱德华原厂 STP 系列专用控制器,适配 STP-A1603C 磁悬浮分子泵。
带自动减振和自动平衡功能,管理磁轴承系统的稳定运行。
集成故障诊断与状态监测,可输出泵的运行状态信号。
配有通信端口,支持远程启停和状态反馈。
有过 SCU-800 的型号标注,属于同一控制单元家族。
产品参数
型号:SCU-A1603C,部分标注为 SCU-800。
制造商:BOC Edwards(爱德华)。
适用泵型:STP-A1603C 系列。
输入电压:200 到 240 伏交流。
功能:将单相交流转换为三相直流驱动泵电机,并管理磁轴承和可选温控系统。
应用领域
半导体刻蚀工艺的真空控制。
薄膜沉积设备的真空系统。
需要高真空环境的工业镀膜产线。
老旧爱德华 STP 系列分子泵的维保替换。
半导体设备真空系统的维修与备件流通。
总的来说,这就是爱德华 STP-A1603C 分子泵的配套控制器,二手和翻新件都有流通,用之前确认一下泵型匹配和输入电压。
Edwards SCU-A1603C涡轮分子泵控制单元 英文介绍
Edwards SCU-A1603C is a dedicated control unit for the Edwards STP series magnetic levitation turbo molecular pump, mainly used to drive pumps such as STP-A1603C and manage their operating status.
Product Features
Edward's original STP series dedicated controller, compatible with STP-A1603C magnetic levitation molecular pump.
Equipped with automatic vibration reduction and automatic balancing functions, it manages the stable operation of the magnetic bearing system.
Integrated fault diagnosis and status monitoring, capable of outputting pump operation status signals.
Equipped with communication ports, supporting remote start stop and status feedback.
There has been a model designation for SCU-800, which belongs to the same control unit family.
Product Specifications
Model: SCU-A1603C, partially labeled as SCU-800.
Manufacturer: BOC Edwards.
Applicable pump type: STP-A1603C series.
Input voltage: 200 to 240 volts AC.
Function: Convert single-phase AC to three-phase DC to drive the pump motor, and manage the magnetic bearings and optional temperature control system.
Application Areas
Vacuum control of semiconductor etching process.
Vacuum system for thin film deposition equipment.
An industrial coating production line that requires a high vacuum environment.
Maintenance and replacement of old Edward STP series molecular pumps.
Maintenance and spare parts circulation of semiconductor equipment vacuum systems.
Overall, this is the matching controller for the Edward STP-A1603C molecular pump. Both second-hand and refurbished parts are in circulation. Please confirm the pump type matching and input voltage before use.
Edwards SCU-A1603C涡轮分子泵控制单元 产品图片

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