VAT 64250-CE52-1101高压高真空闸阀 PDF资料
VAT 64250-CE52-1101 这款高压高真空闸阀,简单说就是瑞士 VAT 制造、用在半导体高真空工艺中的电动闸阀。
产品特点
瑞士 VAT 原厂制造,VAT 是高真空阀门领域的头部品牌,产品带 CE 认证。
采用电动执行器驱动,带步进电机,不是手动操作的类型。
属于 Series 64.2 系列,在半导体设备中作为高真空隔离阀使用。
流通的多为拆机工作件(Working Surplus),外观可能存在轻微使用痕迹。
结构上属于节流型闸阀(Throttling Gate Valve),带控制功能。
产品参数
型号:64250-CE52-1101。
法兰类型:Conflat(CF)。
法兰尺寸:320 毫米,约 12.6 英寸,属于 12 寸 CF 法兰。
阀体材质:不锈钢。
执行器:步进电机驱动。
应用领域
半导体晶圆制造核心工艺设备的高真空隔离。
晶圆制造辅助工艺设备中的真空系统控制。
半导体封装测试环节的真空环境维持。
高真空系统中需要电动控制开合的隔离位置。
老旧半导体设备的维保替换件。
总的来说,这就是 VAT 的一块 12 寸 CF 法兰电动高真空闸阀
VAT 64250-CE52-1101高压高真空闸阀 英文介绍
The VAT 64250-CE52-1101 high-pressure high vacuum gate valve is simply an electric gate valve manufactured by Swiss VAT and used in semiconductor high vacuum processes.
Product Features
Swiss VAT factory manufacturing, VAT is a leading brand in the field of high vacuum valves, and its products come with CE certification.
It is driven by an electric actuator and equipped with a stepper motor, not a manual operation type.
Belonging to the Series 64.2 series, it is used as a high vacuum isolation valve in semiconductor equipment.
The circulating items are mostly Working Surplus, which may have slight signs of use on their appearance.
Structurally, it belongs to the throttling gate valve with control function.
Product Specifications
Model: 64250-CE52-1101.
Flange type: Conflat (CF).
Flange size: 320 millimeters, approximately 12.6 inches, belonging to a 12 inch CF flange.
Valve body material: stainless steel.
Executor: Stepper motor drive.
Application Areas
High vacuum isolation of core process equipment in semiconductor wafer manufacturing.
Vacuum system control in wafer manufacturing auxiliary process equipment.
Maintain the vacuum environment in the semiconductor packaging testing process.
Isolation positions that require electric control for opening and closing in high vacuum systems.
Replacement parts for maintenance of old semiconductor equipment.
Overall, this is a 12 inch CF flange electric high vacuum gate valve for VAT
VAT 64250-CE52-1101高压高真空闸阀 产品图片

3.其他产品
IS215UCVEMO6A控制器模块
CI631 3BSE016347R1接口模块
AO2020 CALDOS25气体分析器
4.其他产品
ICS TRIPLEX T8850 base module
SIEGER 05701-A-0512 Digital logic module
Reliance Electric S-D4006-D module
| 6ES5314-3UH12 | CACR-IR1020CB | 6DD2920-0XB02 |
| 6ES5314-3UA11 | CACR-SR03SZ1SSY109 | 6ES5240-1AA21 |
| 6ES5312-5CA12 | 6SC9711-0AL0 | 6DD2920-0XB01 |
| 6ES5312-5AA31 | CACR-PR01KA4BU | 6ES5187-5UA11 |
| 6ES5311-3KA11 | 6SC6030-2AA02 | 6DD2920-0WB00 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:https://www.jiangxidcs.com



