AE A3L5080BA140D211A射频发生器 PDF资料
AE A3L5080BA140D211A 这款射频发生器,简单说就是 Advanced Energy 旗下 Apex 系列的产品,功率 1.5 千瓦。
产品特点
属于 Advanced Energy 的 Apex 1513 系列射频发生器,品牌在半导体射频电源领域比较常见。
输出功率 1.5 千瓦,属于中等功率级别的射频电源。
产品分类归在射频电源和等离子体发生器这一类。
在二手设备市场有一定流通量,常出现在美国新墨西哥州阿尔伯克基的货源中。
属于工业射频电源,适合等离子体工艺相关的应用场景。
产品参数
型号:A3L5080BA140D211A。
系列:Apex 1513。
输出功率:1.5 千瓦。
类型:射频发生器 / 射频电源。
产地:美国制造。
应用领域
半导体等离子体工艺设备的射频功率供给。
等离子体刻蚀和沉积工艺。
工业等离子体处理系统。
射频电源相关的老旧设备维保替换。
Advanced Energy Apex 系列射频发生器的配套替换件。
总的来说,这就是 Advanced Energy 的一块 1.5 千瓦射频发生器,二手市场有流通,用之前确认一下功率和接口是否匹配。
AE A3L5080BA140D211A射频发生器 英文介绍
The AE A3L5080BA140D211A RF generator is simply a product of Advanced Energy's Apex series, with a power of 1.5 kilowatts.
Product Features
Apex 1513 series RF generators belonging to Advanced Energy are commonly used in the field of semiconductor RF power supplies.
The output power is 1.5 kilowatts, which belongs to the medium power level of RF power supply.
The product is classified under the categories of RF power supplies and plasma generators.
There is a certain amount of circulation in the second-hand equipment market, often appearing in the source of goods in Albuquerque, New Mexico, USA.
Belonging to industrial RF power supply, suitable for plasma process related application scenarios.
Product Specifications
Model: A3L5080BA140D211A.
Series: Apex 1513.
Output power: 1.5 kilowatts.
Type: RF generator/RF power supply.
Origin: Made in the United States.
Application Areas
RF power supply for semiconductor plasma process equipment.
Plasma etching and deposition processes.
Industrial plasma processing system.
Maintenance and replacement of old equipment related to RF power supply.
Replacement parts for the Advanced Energy Apex series RF generator.
Overall, this is a 1.5kW RF generator from Advanced Energy, available in the second-hand market. Please confirm the power and interface compatibility before use.
AE A3L5080BA140D211A射频发生器 产品图片

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