Neslab 277003200000数字循环系统 PDF资料
Comet Technologies 832-242736-002 这款射频匹配网络模块,简单说就是 Lam Research(泛林)设备上用的射频阻抗匹配器。
产品特点
Comet Technologies 原厂射频匹配网络,美国制造,属于 Lam Research 的配套部件。
对应 Comet 内部型号 20105342,是专门为 Lam 设备定制的射频匹配器。
流通的多为拆机工作件(Working Surplus),外观可能存在安装耳弯折等轻微痕迹。
属于半导体等离子体工艺设备射频系统的核心部件。
在二手备件市场有一定流通量,作为维保替换件使用。
产品参数
Lam Research 零件号:832-242736-002。
Comet 型号:20105342。
类型:射频匹配网络模块(RF Match)。
产地:美国制造。
状态:拆机工作件为主。
应用领域
Lam Research 半导体设备的等离子体工艺射频匹配。
射频电源与工艺腔体之间的阻抗调谐。
刻蚀和沉积工艺的射频功率传输。
老旧 Lam 设备的维保替换。
Comet 射频匹配系列产品的配套替换。
总的来说,这就是 Lam 设备上的一块射频匹配器,Comet 代工,拆机件居多,用之前确认一下外观和型号就行。
Neslab 277003200000数字循环系统 英文介绍
Comet Technologies 832-242736-002 is an RF impedance matching module used on Lam Research devices.
Product Features
Comet Technologies' original RF matching network, manufactured in the United States, is a supporting component of Lam Research.
Corresponding to Comet's internal model 20105342, it is a specially customized RF matching device for Lam equipment.
The circulating parts are mostly Working Surplus, which may have slight traces such as installation ear bends on the appearance.
It is the core component of the RF system in semiconductor plasma process equipment.
There is a certain amount of circulation in the second-hand spare parts market, which is used as maintenance replacement parts.
Product Specifications
Lam Research part number: 832-242736-002.
Comet model: 20105342.
Type: RF Match Network Module.
Origin: Made in the United States.
Status: Mainly disassembled work pieces.
Application Areas
Plasma process RF matching for Lam Research semiconductor equipment.
Impedance tuning between RF power supply and process chamber.
RF power transmission for etching and deposition processes.
Maintenance and replacement of old Lam equipment.
Replacement of Comet RF matching series products.
In general, this is an RF matching device on Lam equipment, manufactured by Comet, mostly with disassembled parts. Just confirm the appearance and model before use.
Neslab 277003200000数字循环系统 产品图片

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