ADTEC 27-307431-00等离子体发生器模块 PDF资料
ADTEC 27-307431-00 这款等离子体发生器模块,简单说就是诺发(Novellus)半导体设备上用的射频电源。
产品特点
ADTEC 原厂射频等离子体发生器,日本制造,带 CE 认证。
属于 AXR-2000III 系列,是诺发系统的配套电源模块。
流通的多为拆机工作件,状态标为 Working Surplus。
ADTEC 是专业的等离子体电源制造商,主要客户包括应用材料、诺发等设备大厂。
属于诺发设备射频电源系统的核心部件。
产品参数
型号:AXR-2000III,诺发零件号 27-307431-00。
输入:三相 200 到 220 伏交流,50 或 60 赫兹,4.1 千伏安。
输出功率:2000 瓦。
类型:射频等离子体发生器模块。
产地:日本制造。
应用领域
诺发半导体制造设备的等离子体工艺环节。
半导体晶圆制造中的射频电源供给。
液晶面板制造设备的等离子体工艺。
老旧诺发设备的维保替换件。
ADTEC AXR 系列电源模块的配套替换。
总的来说,这就是诺发设备上的一块射频等离子体电源,拆机件居多,用之前确认一下输入输出和外观状态。
ADTEC 27-307431-00等离子体发生器模块 英文介绍
The ADTEC 27-307431-00 plasma generator module is simply an RF power supply used in Novellus semiconductor equipment.
Product Features
ADTEC original RF plasma generator, made in Japan, with CE certification.
Belonging to the AXR-2000III series, it is a matching power module for the Nofa system.
The circulating items are mostly dismantled work pieces, with the status marked as Working Surplus.
ADTEC is a professional plasma power supply manufacturer, with main customers including major equipment manufacturers such as Applied Materials and Nofa.
Belonging to the core components of the RF power supply system of Nofa equipment.
Product Specifications
Model: AXR-2000III, Nofa part number 27-307431-00.
Input: Three phase 200 to 220 volt AC, 50 or 60 hertz, 4.1 kVA.
Output power: 2000 watts.
Type: RF plasma generator module.
Origin: Made in Japan.
Application Areas
The plasma process of Nuofa Semiconductor Manufacturing Equipment.
RF power supply in semiconductor wafer manufacturing.
Plasma process for LCD panel manufacturing equipment.
Replacement parts for maintenance of old Nofa equipment.
Replacement of ADTEC AXR series power modules.
Overall, this is an RF plasma power supply on the Nofa equipment, mostly disassembled. Please confirm the input/output and appearance status before use.
ADTEC 27-307431-00等离子体发生器模块 产品图片

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