AMAT 0100-02735控制器模块 PDF资料
AMAT 0100-02735 这块板子,简单说就是应用材料设备上用的数字 I/O 接口板,管的是信号输入输出的活儿。
产品特点
应用材料原厂数字 I/O 接口 PCB,用在 200mm 和 300mm 半导体设备上。
主要管二进制开关信号,协调气动阀门、真空互锁和安全传感器的动作。
带光耦隔离,控制逻辑和现场高压设备之间隔开,保护主控板。
装在 Centura 和 Endura 设备的电子柜里,提供稳定的腔体逻辑控制。
高通道密度设计,一个 VME 槽位塞几十个 I/O 点,省机架空间。
产品参数
零件号:0100-02735。
描述:PCA,数字 I/O 接口板。
接口架构:VMEbus 高密度带状连接器。
逻辑电压:内部 5V DC,现场侧 24V DC。
兼容平台:AMAT Centura、Endura、Precision 5000。
应用领域
应用材料 Centura 和 Endura 平台的电子柜。
气路阀门和气动执行器的开关控制。
真空互锁监测,确保腔体达到基础真空后才允许开射频。
腔盖和防护门的安全联锁监测。
传输腔和工艺模块之间狭缝阀的开关时序协调。
总的来说,CPU 负责做决定,这块板子负责执行,检查每一个安全闩锁、扳动每一个气阀。系统不报 I/O 相关故障的话,一般不用动它。
AMAT 0100-02735控制器模块 英文介绍
The AMAT 0100-02735 board, in simple terms, is a digital I/O interface board used in application materials and equipment, responsible for signal input and output tasks.
Product Features
Applied raw material digital I/O interface PCB, used on 200mm and 300mm semiconductor devices.
Mainly responsible for binary switch signals, coordinating the actions of pneumatic valves, vacuum interlocks, and safety sensors.
Equipped with optocoupler isolation, the control logic is separated from the on-site high-voltage equipment to protect the main control board.
Installed in the electronic cabinets of Centura and Endura devices, providing stable cavity logic control.
High channel density design, with dozens of I/O points plugged into one VME slot, saving rack space.
Product Specifications
Part number: 0100-02735.
Description: PCA, digital I/O interface board.
Interface architecture: VMEbus high-density ribbon connector.
Logic voltage: Internal 5V DC, on-site 24V DC.
Compatible platforms: AMAT Centura, Endura, Precision 5000.
Application Areas
Electronic cabinets using Centura and Endura platforms.
Switch control of pneumatic valves and pneumatic actuators.
Vacuum interlock monitoring ensures that the cavity reaches the basic vacuum before allowing RF to be turned on.
Safety interlock monitoring of chamber cover and protective door.
Coordination of the timing of the opening and closing of the slit valve between the transmission chamber and the process module.
Overall, the CPU is responsible for making decisions, while this board is responsible for executing, checking every safety latch, and turning every air valve. If the system does not report I/O related faults, it is generally not necessary to operate it.
AMAT 0100-02735控制器模块 产品图片

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