Kyoto Denkiki KDS-30350SF高压电源模块 PDF资料
Kyoto Denkiki KDS-30350SF 这块电源模块,简单说就是日立半导体设备上用的高压直流电源。
产品特点
京都电机制造,日本原产,属于高频开关电源类产品。
主要作为日立浅槽刻蚀设备的配套电源使用,常见于 MU-712E 和 M-712E 系统。
流通的多为拆机件,有拆机工作件和新库存件两种状态。
外观常见面板轻微磕碰、风扇被拆或按钮盖缺失等情况。
京都电机的 KDS-30350 系列属于其直流电源产品线,同系列还有多个衍生型号。
产品参数
型号:KDS-30350SF,部分场景标为 KDS-30350SFX。
输入:三相 200 到 220 伏,50 或 60 赫兹,电流 40 安培。
输出:350 伏,30 安培。
类型:高压直流电源模块。
产地:日本制造。
应用领域
日立浅槽刻蚀设备,为工艺腔体提供直流电力。
半导体制造前道工序中的刻蚀环节。
老旧日立设备的维保替换,原厂件不好找时的拆机备件来源。
相关电源系统的维修与拆件利用。
同系列电源模块的配套替换。
总的来说,这就是日立刻蚀设备上的一块高压电源,拆机件居多,状态参差不齐,用之前最好确认一下输入输出和物理外观。
Kyoto Denkiki KDS-30350SF高压电源模块 英文介绍
The power module of Kyoto Denkiki KDS-30350SF is simply a high-voltage DC power supply used in Hitachi semiconductor equipment.
Product Features
Kyoto Electric Manufacturing, originating from Japan, belongs to the category of high-frequency switching power supply products.
Mainly used as a matching power supply for Hitachi shallow groove etching equipment, commonly found in the MU-712E and M-712E systems.
Most of the items in circulation are dismantled parts, which can be in two states: dismantled work parts and new inventory parts.
Common appearance issues include slight scratches on the panel, removal of the fan, or missing button covers.
Kyoto Electric's KDS-30350 series belongs to its DC power supply product line, and there are multiple derivative models in the same series.
Product Specifications
Model: KDS-30350SF, with some scenes labeled as KDS-30350SFX.
Input: Three phase 200 to 220 volts, 50 or 60 hertz, current 40 amperes.
Output: 350 volts, 30 amperes.
Type: High voltage DC power module.
Origin: Made in Japan.
Application Areas
Hitachi shallow groove etching equipment provides DC power to the process chamber.
The etching process in the pre-processing of semiconductor manufacturing.
The maintenance and replacement of old Hitachi equipment, as well as the source of disassembly spare parts when original factory parts are difficult to find.
Maintenance and disassembly utilization of related power systems.
Replacement of matching power modules in the same series.
Overall, this is a high-voltage power supply on Hitachi etching equipment, with many disassembled parts and varying states. It is best to confirm the input/output and physical appearance before use.
Kyoto Denkiki KDS-30350SF高压电源模块 产品图片

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