Nikon 4S013-374-1直线电机接口PCB PDF资料
Nikon 4S013-374-1 这块板子,简单说就是尼康 NSR 系列光刻机里管直线电机接口的 PCB。
产品特点
尼康 NSR 系列光刻机的原厂配套部件,型号对应 PADATAIF-X4B。
属于直线电机接口 PCB,负责信号传输与控制。
安装在光刻机运动系统中,配合直线电机工作。
流通的多为从 NSR 系统拆下来的工作闲置件。
日本制造,属尼康原厂精密电子部件。
产品参数
零件号:4S013-374-1。
型号:PADATAIF-X4B。
类型:直线电机接口 PCB。
适用系统:Nikon NSR 系列光刻机。
相关型号:SPA256A 出现在同系列电机控制部件中。
应用领域
尼康 NSR 系列光刻机运动系统。
晶圆台和掩模台的直线电机驱动控制。
光刻机精密定位与运动控制。
半导体设备维保备件替换。
老旧尼康光刻机维修时的接口板替换件。
总的来说,就是尼康光刻机运动系统里一个老老实实干活的接口件,系统不报电机相关故障一般不用动它
Nikon 4S013-374-1直线电机接口PCB 英文介绍
The Nikon 4S013-374-1 board is simply the PCB for the linear motor interface in Nikon NSR series lithography machines.
Product Features
The original matching components of Nikon NSR series lithography machines, corresponding to the model PADATAIF-X4B.
Belonging to the linear motor interface PCB, responsible for signal transmission and control.
Installed in the motion system of the lithography machine, it works in conjunction with a linear motor.
The circulating items are mostly idle work parts removed from the NSR system.
Made in Japan, it is a precision electronic component manufactured by Nikon.
Product Specifications
Part number: 4S013-374-1.
Model: PADATAIF-X4B.
Type: Linear motor interface PCB.
Applicable system: Nikon NSR series lithography machine.
Related model: SPA256A appears in the same series of motor control components.
Application Areas
Nikon NSR series lithography machine motion system.
Linear motor drive control for the wafer stage and mask stage.
Precision positioning and motion control of lithography machines.
Replacement of spare parts for semiconductor equipment maintenance.
Replacement parts for interface boards during maintenance of old Nikon lithography machines.
In general, it is an interface component in the Nikon lithography machine motion system that works diligently. If the system does not report motor related faults, it generally does not need to be touched
Nikon 4S013-374-1直线电机接口PCB 产品图片

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