SMC XLA-80-X741高真空角阀  PDF资料

1.产 品 资 料 介 绍：

SMC XLA-80-X741 这个高真空角阀，是 SMC 的 XLA 系列铝制高真空角阀，法兰尺寸 80，AMAT 对应的零件号是 3870-03183，日本制造，市面上有全新剩余件流通。

产品特点
1 SMC 原厂 XLA 系列铝制高真空角阀，法兰尺寸 80，AMAT 对应零件号 3870-03183
2 波纹管密封设计，单作用常闭型，靠加压打开
3 铝制阀体，轻量紧凑，导热好，能减少气体在阀内冷凝
4 阀体不含镍铬等重金属，对晶圆污染小，适合半导体工艺
5 波纹管组件可单独更换，维护成本低，法兰 80 尺寸寿命能到 200 万次

产品参数
1 型号 XLA-80-X741，属于 XLA 系列
2 法兰尺寸 80，法兰类型 KF(NW) 或 K(DN)
3 工作温度 5 到 60℃，高温型可到 150℃
4 工作压力 1×10⁻⁶ Pa 到大气压
5 导流能力 200 L/s，先导压力 0.4 到 0.7 MPa

产品应用领域
1 半导体制造的高真空腔体抽气与隔离
2 需要低放气、低重金属污染的晶圆工艺
3 平板显示、太阳能等电子生产设备
4 设备维护或备件替换时用
5 老旧真空系统的维修翻新

SMC XLA-80-X741 在半导体真空系统里算是个常用阀，铝体轻巧，波纹管密封可靠，

SMC XLA-80-X741高真空角阀   英文介绍

The SMC XLA-80-X741 high vacuum angle valve is SMC's XLA series aluminum high vacuum angle valve, with a flange size of 80 and corresponding part number 3870-03183 for AMAT. It is manufactured in Japan and has brand new spare parts in circulation on the market.

Product Features

SMC original XLA series aluminum high vacuum angle valve, flange size 80, AMAT corresponding part number 3870-03183

2. Bellows sealed design, single acting normally closed type, opened by pressure

3 aluminum valve body, lightweight and compact, good thermal conductivity, can reduce gas condensation inside the valve

The valve body does not contain heavy metals such as nickel chromium, which causes minimal contamination to the wafer and is suitable for semiconductor processes

5 corrugated pipe components can be replaced separately, with low maintenance costs. The flange size of 80 can have a lifespan of up to 2 million times

Product Specifications

Model XLA-80-X741 belongs to the XLA series

2 flange size 80, flange type KF (NW) or K (DN)

3 working temperatures range from 5 to 60 ℃, and the high-temperature type can reach up to 150 ℃

4. Working pressure from 1 × 10 ⁻⁶ Pa to atmospheric pressure

5 diversion capacity of 200 L/s, pilot pressure of 0.4 to 0.7 MPa

Product application areas

High vacuum chamber pumping and isolation in semiconductor manufacturing

2. Wafer processes that require low gas release and low heavy metal pollution

3. Electronic production equipment such as flat panel displays and solar energy

Used for equipment maintenance or spare parts replacement

5 Maintenance and Renovation of Old Vacuum Systems

SMC XLA-80-X741 is a commonly used valve in semiconductor vacuum systems, with a lightweight aluminum body and reliable bellows sealing,

SMC XLA-80-X741高真空角阀 产品图片

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型号：SMC XLA-80-X741高真空角阀

质保：一年

成色：全新/二手

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