Agilent EX9698812涡轮分子泵 PDF资料
Agilent EX9698812 是 Agilent（原 Varian）TV903 涡轮分子泵的部件号，属于用于高真空/超高真空环境的小型集成式分子泵系统。
特点
高转速设计：额定转速高达 48000 rpm，启动迅速（0-48000 rpm 启动时间小于 3 分钟）。
紧凑集成系统：泵体与控制器集成设计，体积小、重量轻、振动低。
高稳定性：为 24/7 持续运行设计，对冷凝液有较好耐受性，断电时不会放气。
洁净真空：无污染源设计，适用于需要“洁净”真空的精密应用场景。
安装灵活：可在任意位置运行，支持高真空法兰端承重。
参数
抽速：N₂ 为 680 L/s，He 为 700 L/s。
极限真空：< 1×10⁻⁷ mbar（< 1×10⁻⁷ Torr）。
进气法兰：DN 160 ISO-F（特殊法兰）。
出气法兰：KF 25（NW25）。
冷却方式：自然空气对流，可选强制风冷或水冷。
应用领域
LC-MS/MS 质谱仪：该型号大量从 AB Sciex API4000 等质谱系统拆解流通。
高真空/超高真空系统：适用于科研与工业级超高真空环境搭建。
表面分析仪器：为需要洁净真空的分析设备提供前级高真空。
半导体与薄膜设备：用于需要高抽速洁净真空的工艺腔室。
科研实验装置：适用于各类物理、化学实验中的真空获得系统。
结尾说明：Agilent EX9698812（TV903）为涡轮分子泵系统，需搭配前级泵（推荐 DS 402 或 TriScroll 300）及对应控制器（如 969-6501）使用，多用于质谱仪等高真空场景的维修替换。
Agilent EX9698812 is the part number for the Agilent (formerly Varian) TV903 turbomolecular pump, which belongs to a small integrated molecular pump system designed for high/ultra-high vacuum environments.
Characteristics
High speed design: With a rated speed of up to 48000 rpm, it starts quickly (with a start-up time of less than 3 minutes from 0 to 48000 rpm).
Compact integrated system: pump body and controller integrated design, small size, light weight, low vibration.
High stability: Designed for 24/7 continuous operation, it has good tolerance to condensate and will not release air when power is off.
Clean Vacuum: Designed with no pollution source, suitable for precision applications that require "clean" vacuum.
Flexible installation: It can run in any position and supports high vacuum flange end load-bearing.
parameter
Pumping speed: 680 L/s for N ₂ and 700 L/s for He.
Extreme vacuum:<1 × 10 ⁻⁷ mbar (<1 × 10 ⁻⁷ Torr).
Inlet flange: DN 160 ISO-F (special flange).
Exhaust flange: KF 25 (NW25).
Cooling method: Natural air convection, optional forced air cooling or water cooling.
Application Areas
LC-MS/MS mass spectrometer: This model is extensively disassembled and circulated from mass spectrometry systems such as AB Sciex API4000.
High vacuum/ultra-high vacuum system: suitable for building research and industrial grade ultra-high vacuum environments.
Surface analysis instrument: provides a pre stage high vacuum for analytical equipment that requires clean vacuum.
Semiconductor and thin film equipment: used in process chambers that require high pumping speed and clean vacuum.
Research experimental device: suitable for vacuum acquisition systems in various physics and chemistry experiments.
Conclusion: Agilent EX9698812 (TV903) is a turbomolecular pump system that requires a front-end pump (recommended DS 402 or TriScroll 300) and corresponding controller (such as 969-6501) for use. It is commonly used for maintenance and replacement in high vacuum scenarios such as mass spectrometers.
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