AMAT 0190-45636射频匹配器 PDF资料
AMAT 0190-45636（ADTEC AX-3000III）射频发生器
五条特点
输出功率 3000W，适合高功率等离子体工艺。
工作频率 13.56MHz，半导体行业标准频段。
三相 200-220VAC 输入，工业级供电。
日本 ADTEC 原厂制造，带 CE 认证。
目前多为二手/闲置流通件，用于维修替换。
五条参数
输出功率：3000W
工作频率：13.56MHz
输入电压：三相 200-220VAC
型号：ADTEC AX-3000III
产地：日本
五条应用领域
半导体等离子体刻蚀
等离子体增强化学气相沉积（PECVD）
溅射与薄膜沉积
等离子体表面处理与清洗
工业及科研等离子体设备
结尾说明：AMAT 0190-45636（ADTEC AX-3000III）是射频发生器，负责产生射频功率；若需阻抗匹配，还需另配射频匹配器（如 ADTEC AM 系列）。
AMAT 0190-45636射频匹配器 英文介绍
AMAT 0190-45636 (ADTEC AX-3000III) RF Generator
Five characteristics
Output power of 3000W, suitable for high-power plasma technology.
The working frequency is 13.56MHz, which is the standard frequency band in the semiconductor industry.
Three phase 200-220V AC input, industrial grade power supply.
Made by ADTEC in Japan with CE certification.
At present, most of them are second-hand/idle circulating parts used for maintenance and replacement.
Five parameters
Output power: 3000W
Working frequency: 13.56MHz
Input voltage: Three phase 200-220V AC
Model: ADTEC AX-3000III
Origin: Japan
Five application areas
Semiconductor plasma etching
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Sputtering and Thin Film Deposition
Plasma surface treatment and cleaning
Industrial and scientific plasma equipment
Conclusion: AMAT 0190-45636 (ADTEC AX-3000III) is an RF generator responsible for generating RF power; If impedance matching is required, an additional RF matching device (such as ADTEC AM series) is also needed.
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