ENI GHW12Z-12098电源系统 PDF资料
ENI GHW12Z-12098,这是 ENI Genesis 系列射频发生器,AMAT 备件号 0190-42871,产线机台上干射频这摊活的。
产品特点
ENI Genesis 系列射频发生器,ENI(现属 MKS)原厂制造
AMAT 应用材料备件号 0190-42871,直接适配产线设备
属于 GHW-12Z 系列,工业射频场景的成熟方案
常见于二手市场,有工作正常的 surplus 件流通
CE 认证,产地为中国
产品参数
制造商:ENI(MKS)
系列:Genesis
型号:GHW-12Z
部件号:GHW12Z-12098
AMAT 备件号:0190-42871
输入:三相 480VAC,50/60Hz
输出功率:1250W
状态:Working Surplus
应用领域
AMAT 半导体设备射频供电
等离子体工艺射频控制
老旧机台的备件替换与维修
二手半导体设备翻新与流通
这台 ENI GHW12Z-12098 说白了就是 ENI 给 AMAT 设备供的 Genesis 系列射频发生器,产线上跑着的老机台要是射频这块出问题,找它替换就行
ENI GHW12Z-12098电源系统 英文介绍
ENI GHW12Z-12098, This is the ENI Genesis series RF generator, AMAT spare part number 0190-42871, used for RF work on production line machines.
Product Features
ENI Genesis series RF generator, manufactured by ENI (now MKS) factory
AMAT application material spare part number 0190-42871, directly compatible with production line equipment
Belonging to the GHW-12Z series, a mature solution for industrial RF scenarios
Commonly seen in the second-hand market, there are surplus items in circulation that work normally
CE certification, originating from China
Product Specifications
Manufacturer: ENI (MKS)
Series: Genesis
Model: GHW-12Z
Part number: GHW12Z-12098
AMAT spare part number: 0190-42871
Input: Three phase 480VAC, 50/60Hz
Output power: 1250W
Status: Working Surplus
Application Areas
AMAT Semiconductor Equipment RF Power Supply
RF control of plasma process
Replacement and maintenance of spare parts for old machines
Renovation and circulation of second-hand semiconductor equipment
This ENI GHW12Z-12098 is essentially the Genesis series RF generator provided by ENI to AMAT equipment. If there are any RF issues with the old machines running on the production line, they can be replaced with it

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