Brookhaven E20000173扫描放大器 PDF资料

1.产 品 资 料 介 绍：

Brookhaven E20000173，这是 Varian/Applied Materials 离子注入机上的扫描放大器，对应 Brookhaven SCANMASTER II 系列，型号 SM 3000。

产品特点

• SCANMASTER II 固态扫描放大器，Varian 半导体设备原厂备件号 E20000173

• 用于离子注入机的束流扫描控制，驱动扫描板实现束流均匀性调节

• 固态设计，相比电子管方案更可靠、寿命更长

• 常见于二手市场，有翻新件流通

• 同系列还有 SM 350、SM 4000 等型号，适配不同机台配置

产品参数

• 制造商：Brookhaven Instruments

• 系列：SCANMASTER II

• 型号：SM 3000

• 扫描放大器部件号：25620094

• Varian 设备备件号：E20000173

• 配套高压直流偏置电源：25520160

应用领域

• Varian/Applied Materials 离子注入机

• 半导体离子注入工艺的束流扫描控制

• 老旧注入机台的备件替换与维修

• 二手半导体设备翻新与流通

这台 Brookhaven E20000173 就是 SCANMASTER II 系列的 SM 3000 扫描放大器，在 Varian 注入机上负责束流扫描这摊活

Brookhaven E20000173扫描放大器  英文介绍

Brookhaven E20000173， This is the scanning amplifier on the Varian/Applied Materials ion implantation machine, corresponding to the Brookhaven SCANMASTER II series, model SM 3000.

Product Features

SCANMASTER II solid-state scanning amplifier, Varian semiconductor equipment original spare part number E20000173

Used for beam scanning control of ion implantation machines, driving the scanning plate to achieve beam uniformity adjustment

Solid state design is more reliable and has a longer lifespan compared to electronic tube solutions

Commonly seen in the second-hand market, with refurbished parts in circulation

There are also models such as SM 350 and SM 4000 in the same series, which are compatible with different machine configurations

Product Specifications

Manufacturer: Brookhaven Instruments

Series: SCANMASTER II

Model: SM 3000

Scanning amplifier part number: 25620094

Varian equipment spare part number: E20000173

Supporting high-voltage DC bias power supply: 25520160

Application Areas

Varian/Applied Materials ion implantation machine

Beam scanning control of semiconductor ion implantation process

Replacement and maintenance of spare parts for old injection machines

Renovation and circulation of second-hand semiconductor equipment

This Brookhaven E20000173 is the SM 3000 scanning amplifier of the SCANMASTER II series, responsible for beam scanning on the Varian injection machine

Brookhaven E20000173扫描放大器

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型号：Brookhaven E20000173扫描放大器

质保：一年

成色：全新/二手

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