TEL T-3044SS信号塔 PDF资料
TEL T-3044SS，这其实是东京电子（Tokyo Electron）的一款半导体干法刻蚀设备，不是信号塔。你可能是把型号记混了。
产品特点
专为化学刻蚀和金属掩膜刻蚀设计的干法刻蚀系统
模块化架构，支持多种刻蚀功能，自动化设置减少时间和人工
全封闭单元设计，最大限度减少化学品泄漏，运行安全性高
配备高精度 X-Y 平台（1 µm 分辨率）和高速对准台
先进 PLC 软件，支持自动图形识别和材料轮廓分析
产品参数
制造商：Tokyo Electron（TEL）
型号：T-3044SS
设备类型：干法刻蚀机 / 灰化机
核心组件：主机架、1 µm 分辨率 X-Y 平台、高速对准台
显示：15 英寸彩色显示屏
适用材料：石英、硅晶圆等多种半导体基板
应用领域
半导体和集成电路制造
化学刻蚀工艺
金属掩膜刻蚀
自动化晶圆刻蚀作业
研发与量产环境
总结
TEL T-3044SS 是东京电子的一款干法刻蚀设备，模块化设计、全封闭运行，在半导体和集成电路制造里干的是化学刻蚀和金属掩膜刻蚀的活，自动化程度高，安全性和一致性都有保障。
TEL T-3044SS信号塔 英文介绍
TEL T-3044SS， This is actually a semiconductor dry etching equipment from Tokyo Electron, not a signal tower. You may have mixed up the model number.
Product Features
A dry etching system designed specifically for chemical etching and metal mask etching
Modular architecture, supporting multiple etching functions, automated settings reduce time and labor
Fully enclosed unit design minimizes chemical leakage and ensures high operational safety
Equipped with high-precision X-Y platform (1 µ m resolution) and high-speed alignment stage
Advanced PLC software, supporting automatic graphic recognition and material contour analysis
Product Specifications
Manufacturer: Tokyo Electron (TEL)
Model: T-3044SS
Equipment type: dry etching machine/ashing machine
Core components: mainframe, 1 µ m resolution X-Y platform, high-speed alignment stage
Display: 15 inch color display screen
Applicable materials: various semiconductor substrates such as quartz and silicon wafers
Application Areas
Semiconductor and integrated circuit manufacturing
Chemical etching process
Metal mask etching
Automated wafer etching operation
R&D and mass production environment
Summary
TEL T-3044SS is a dry etching equipment from Tokyo Electronics, with modular design and fully enclosed operation. It performs chemical etching and metal mask etching in semiconductor and integrated circuit manufacturing, with high automation and guaranteed safety and consistency.
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| IC3600SCBN1 | 531X300CCHADM3 | IC3600SSKA1G1C |
| IC3600SCBM2 | 531X300CCHADM2 | IC3600SSKA1F |
| IC3600SCBL1 | 531X300CCHADM1 | IC3600SSKA1 |
| IC3600SCBK1 | 531X300CCHACM1 | IC3600SSIB1 |
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