Lam 660-093818-002射频电源  PDF资料

1.产 品 资 料 介 绍：

Lam 660-093818-002，这是 RFPP 的 RF 25M 射频发生器在 Lam Research 设备里的备件号，专供 Lam 9400 系列刻蚀机用的偏置电源。

产品特点

• RFPP RF 25M 射频发生器，Lam 原厂备件号 660-093818-002

• 专为 Lam 9400 刻蚀机设计，作为 Bias Gen 偏置电源使用

• 工业级固态射频发生，结构紧凑，可靠性高

• 属于 Lam 产线机台的射频电源模块，直接适配原设备

• 常见于二手设备市场，有翻新和测试正常的库存流通

产品参数

• 厂商：RFPP（RF Power Products）

• 型号：RF 25M

• 备件号：660-093818-002 / 3150048-000

• 输出功率：2500W

• 频率范围：3.8 - 4.2 MHz

• 输入：208 VAC，三相，50/60 Hz

应用领域

• Lam Research 9400 刻蚀机偏置电源

• 半导体刻蚀与灰化工艺

• 等离子体偏压控制

• 老旧 Lam 机台的备件替换与维修

• 二手半导体设备流通与翻新

这台 Lam 660-093818-002 说白了就是 RFPP 给 Lam 9400 刻蚀机供的偏置射频电源，2.5kW、4MHz 频段，产线上跑着的老机台要是偏置电源出问题，找它替换就行。

Lam 660-093818-002射频电源   英文介绍

Lam 660-093818-002， This is the spare part number for RFPP's RF 25M RF generator in Lam Research equipment, specifically designed as a bias power supply for Lam 9400 series etching machines.

Product Features

RFPP RF 25M RF generator, Lam original spare part number 660-093818-002

Specially designed for Lam 9400 etching machine, used as Bias Gen bias power supply

Industrial grade solid-state RF generator, compact structure, high reliability

RF power module belonging to Lam production line machine, directly adapted to the original equipment

Commonly found in the second-hand equipment market, with refurbished and tested inventory circulating normally

Product Specifications

Manufacturer: RFPP (RF Power Products)

Model: RF 25M

Spare part number: 660-093818-002/3150048-000

Output power: 2500W

Frequency range: 3.8-4.2 MHz

Input: 208 VAC, three-phase, 50/60 Hz

Application Areas

Lam Research 9400 Etching Machine Bias Power Supply

Semiconductor etching and ashing process

Plasma bias control

Replacement and maintenance of spare parts for old Lam machines

Circulation and refurbishment of second-hand semiconductor equipment

This Lam 660-093818-002 is essentially the bias RF power supply provided by RFPP to the Lam 9400 etching machine. It operates in the 2.5kW, 4MHz frequency band. If there is a problem with the bias power supply of an old machine running on the production line, it can be replaced.

Lam 660-093818-002射频电源 

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型号：Lam 660-093818-002射频电源

质保：一年

成色：全新/二手

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