RENISHAW RLD10-X3-DI 光纤激光编码器 PDF资料
1.产 品 资 料 介 绍：
RENISHAW RLD10-X3-DI 是雷尼绍RLE系列光纤激光编码器系统中的差分干涉仪检测头，用于超高精度位置反馈。
产品特点
属于RLE光纤激光编码器系统的核心检测组件。
需搭配RLU激光装置使用。
采用差分干涉仪设计，测量两个平面镜靶之间的相对位移。
可有效消除共模误差，测量精度高。
系统非线性误差低，位置反馈精度高。
内置光束对准调节机构，集成偏摆和俯仰调整功能。
光纤和电气线缆均可从检测头断开，便于维护。
检测头通常安装在真空腔室外壁，激光束通过视窗进入腔体。
包含安全联锁功能，线缆断开时会阻止激光发射。
常与RLU20激光装置配合使用。
配合RPI20接口，分辨率可达皮米级。
适用于要求次纳米级重复性的测量场景。
应用领域
半导体制造中的精密定位和检测设备。
真空腔体内的晶圆处理与测量系统。
需要纳米级精度的超精密运动平台。
通过多轴潜望镜组合实现多参数测量。
科研机构中的精密测量和实验设备。
航空航天领域的高精度定位系统。
结尾
总之，RENISHAW RLD10-X3-DI 是一款用于纳米级测量精度的光纤激光编码器检测头，适用于半导体制造和真空环境等超精密应用场景
RENISHAW RLD10-X3-DI 光纤激光编码器 英文介绍
RENISHAW RLD10-X3-DI is a differential interferometer detection head used in the Renishaw RLE series fiber laser encoder system for ultra-high precision position feedback.
Product Features
Belonging to the core detection component of RLE fiber laser encoder system.
It needs to be used in conjunction with RLU laser device.
Using a differential interferometer design, measure the relative displacement between two planar mirror targets.
It can effectively eliminate common mode errors and achieve high measurement accuracy.
The system has low nonlinear error and high position feedback accuracy.
Built in beam alignment adjustment mechanism, integrating yaw and pitch adjustment functions.
Both fiber optic and electrical cables can be disconnected from the detection head for easy maintenance.
The detection head is usually installed on the outer wall of the vacuum chamber, and the laser beam enters the chamber through a window.
Contains safety interlock function, which will prevent laser emission when the cable is disconnected.
Often used in conjunction with RLU20 laser devices.
Combined with RPI20 interface, the resolution can reach picometer level.
Suitable for measurement scenarios that require sub nanometer level repeatability.
Application Domain
Precision positioning and testing equipment in semiconductor manufacturing.
Wafer processing and measurement system inside the vacuum chamber.
Ultra precision motion platform requiring nanometer level precision.
Multi parameter measurement is achieved through the combination of multi axis periscopes.
Precision measuring and experimental equipment in scientific research institutions.
High precision positioning systems in the aerospace field.
ending
In summary, RENISHAW RLD10-X3-DI is a fiber laser encoder detection head designed for nanoscale measurement accuracy, suitable for ultra precision applications such as semiconductor manufacturing and vacuum environments
RENISHAW RLD10-X3-DI 光纤激光编码器 产品图片
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