MKS 683B-25580 数字排气节流阀 PDF资料
1.产 品 资 料 介 绍：
MKS 683B-25580 是MKS Instruments推出的683B系列数字排气节流阀，用于真空系统的压力控制。
产品特点
集成控制器和执行机构于一体，无需外接控制模块。
采用第二代PID控制算法，响应快、过冲小。
支持DeviceNet数字通信接口。
可配置压力控制模式和位置控制模式。
内置两个可编程报警继电器，用于安全联锁。
可搭配MKS Baratron电容压力计使用。
阀门分辨率高达1/10000，定位精确。
阀体采用316L不锈钢，密封材质为Viton。
适用于1 atm以内的压差环境。
该产品目前已停产。
应用领域
半导体刻蚀和沉积工艺的真空压力控制。
光伏设备中的真空镀膜工艺。
高真空系统的排气流量调节。
需要精确压力控制的工业过程控制。
结尾
总之，MKS 683B-25580 是一款用于真空系统压力控制的数字排气节流阀
MKS 683B-25580 is a 683B series digital exhaust throttle valve developed by MKS Instruments for pressure control in vacuum systems.
Product Features
Integrate the controller and actuator into one, without the need for an external control module.
Adopting the second-generation PID control algorithm, the response is fast and the overshoot is small.
Supports DeviceNet digital communication interface.
Configurable pressure control mode and position control mode.
Built in two programmable alarm relays for safety interlocking.
Can be used in conjunction with MKS Baratron capacitive pressure gauge.
The valve has a resolution of up to 1/10000 and precise positioning.
The valve body is made of 316L stainless steel and the sealing material is Viton.
Suitable for pressure differential environments within 1 atm.
This product is currently discontinued.
Application Domain
Vacuum pressure control in semiconductor etching and deposition processes.
Vacuum coating process in photovoltaic equipment.
Exhaust flow regulation of high vacuum system.
Industrial process control that requires precise pressure control.
ending
In summary, MKS 683B-25580 is a digital exhaust throttle valve used for pressure control in vacuum systems
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