FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器 PDF资料
1.产 品 资 料 介 绍：
FUJIKIN FCSP8202D-4CW2-F139BF39B 是富士金FCS系列的一款质量流量控制器，用于高精度气体流量测量与控制。
产品特点
属于富士金FCS系列，采用压力控制方式实现流量调节。
流量精度可达≤±1.0% S.P.，控制精度高。
响应速度快，部分型号响应时间≤0.5秒。
支持多气体多量程功能，可灵活变更气体种类和流量范围。
接气部件材质采用316L不锈钢和哈氏合金，耐腐蚀性强。
密封方式可选金属密封，外部泄漏率极低。
支持数字通信接口，如DeviceNet、EtherCAT等。
体积小巧，适合高密度安装的半导体设备。
具备流量自我诊断功能，便于监控和维护。
可克服传统MFC供气压力波动的影响，稳定性好。
应用领域
半导体制造工艺中的气体流量精确控制。
平板显示和太阳能电池生产的镀膜工艺。
化工和制药行业的反应气体配比控制。
分析仪器和实验室科研设备的供气系统。
需要高精度高可靠性气体流量控制的工业设备。
结尾
总之，FUJIKIN FCSP8202D-4CW2-F139BF39B 是一款高精度、耐腐蚀的质量流量控制器，适用于半导体和精密制造领域
FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器 英文介绍
FUJIKIN FCSP8202D-4CW2-F139BF39B is a mass flow controller from the Fujijin FCS series, designed for high-precision gas flow measurement and control.
Product Features
Belonging to the Fuji Gold FCS series, it uses pressure control to achieve flow regulation.
The flow accuracy can reach ≤± 1.0% S.P., with high control accuracy.
Fast response speed, with some models having a response time of ≤ 0.5 seconds.
Supports multi gas and multi range functions, allowing for flexible changes in gas types and flow ranges.
The material of the gas receiving components is 316L stainless steel and Hastelloy, with strong corrosion resistance.
The sealing method can be metal sealing, which has an extremely low external leakage rate.
Support digital communication interfaces such as DeviceNet, EtherCAT, etc.
Compact in size, suitable for high-density installation of semiconductor equipment.
Equipped with traffic self diagnosis function, easy to monitor and maintain.
It can overcome the impact of pressure fluctuations in traditional MFC gas supply and has good stability.
Application Domain
Accurate control of gas flow in semiconductor manufacturing processes.
Coating process for flat panel display and solar cell production.
Control of reaction gas ratios in the chemical and pharmaceutical industries.
Gas supply system for analytical instruments and laboratory research equipment.
Industrial equipment that requires high-precision and high reliability gas flow control.
ending
In summary, FUJIKIN FCSP8202D-4CW2-F139BF39B is a high-precision, corrosion-resistant mass flow controller suitable for the semiconductor and precision manufacturing fields
FUJIKIN FCSP8202D-4CW2 -F139BF39B 质量流量控制器 产品图片
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